Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC)
The processing and application of graphite powder-based sacrificial layer for fabrication of microfluidic structures in LTCC is described. Such layers are produced as pastes, which are screen-printed in LTCC sheets to avoid sagging, by supporting closed, three-dimensional structures such as channels...
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| Veröffentlicht in: | Sensors and actuators. A. Physical. 2006-08, Vol.130, p.560-567 |
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| container_title | Sensors and actuators. A. Physical. |
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| creator | Birol, Hansu Maeder, Thomas Ryser, Peter |
| description | The processing and application of graphite powder-based sacrificial layer for fabrication of microfluidic structures in LTCC is described. Such layers are produced as pastes, which are screen-printed in LTCC sheets to avoid sagging, by supporting closed, three-dimensional structures such as channels, membranes during firing. The aim of the paper is to highlight the selection of paste materials and the effects of processing conditions on the fabricated microfluidic components. It is seen that the complete burnout of graphite powder is the most critical stage as it is in kinetic competition with the open pore-elimination process of LTCC, which occurs at 785
°C in our system. |
| doi_str_mv | 10.1016/j.sna.2005.12.009 |
| format | Article |
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| subjects | Fabrication of microfluidic structures LTCC Permeability of LTCC Sacrificial layer |
| title | Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC) |
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