A piezoelectric micro-actuator with a three-dimensional structure and its micro-fabrication
Piezoelectric micro-actuators are promising for applications in various servo control systems, with the potential to provide ultra-precision positioning and compensation. In this paper, a micro-actuator, which is configured with an “H- shaped” cavity and a pair of high aspect ratio parallel beams, w...
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| Veröffentlicht in: | Sensors and actuators. A. Physical. 2006-08, Vol.130, p.491-496 |
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| container_title | Sensors and actuators. A. Physical. |
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| creator | Gao, Peng Yao, Kui Tang, Xiaosong He, Xujiang Shannigrahi, Santiranjan Lou, Yaolong Zhang, Jian Okada, Kanzo |
| description | Piezoelectric micro-actuators are promising for applications in various servo control systems, with the potential to provide ultra-precision positioning and compensation. In this paper, a micro-actuator, which is configured with an
“H-
shaped” cavity and a pair of high aspect ratio parallel beams, was designed. The micro-actuator with the three-dimensional structure is capable of providing in-plane flexibility and out-of-plane stiffness. Appropriate material processing and batch micro-fabrication schemes were developed to produce the piezoelectric micro-actuator prototypes, involving silicon micro machining, wafer-bonding and integration of piezoelectric thin films. The performance evaluation of the micro-actuator was also conducted. The results demonstrate that a combination of silicon micro-fabrication and piezoelectric thin film deposition is a viable approach to produce miniaturized piezoelectric devices with a complex structure. |
| doi_str_mv | 10.1016/j.sna.2005.11.008 |
| format | Article |
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shaped” cavity and a pair of high aspect ratio parallel beams, was designed. The micro-actuator with the three-dimensional structure is capable of providing in-plane flexibility and out-of-plane stiffness. Appropriate material processing and batch micro-fabrication schemes were developed to produce the piezoelectric micro-actuator prototypes, involving silicon micro machining, wafer-bonding and integration of piezoelectric thin films. The performance evaluation of the micro-actuator was also conducted. The results demonstrate that a combination of silicon micro-fabrication and piezoelectric thin film deposition is a viable approach to produce miniaturized piezoelectric devices with a complex structure.</description><identifier>ISSN: 0924-4247</identifier><identifier>EISSN: 1873-3069</identifier><identifier>DOI: 10.1016/j.sna.2005.11.008</identifier><language>eng</language><publisher>Elsevier B.V</publisher><subject>Micro-actuator ; Micro-fabrication ; Piezoelectric thin film ; Precision positioning ; Wafer-bonding</subject><ispartof>Sensors and actuators. A. Physical., 2006-08, Vol.130, p.491-496</ispartof><rights>2005 Elsevier B.V.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c328t-196a5a06fc664d8e06874d5e32a42b0b466b599209f1f25e4baae3c5cdb11ff13</citedby><cites>FETCH-LOGICAL-c328t-196a5a06fc664d8e06874d5e32a42b0b466b599209f1f25e4baae3c5cdb11ff13</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.sna.2005.11.008$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,780,784,3549,27923,27924,45994</link.rule.ids></links><search><creatorcontrib>Gao, Peng</creatorcontrib><creatorcontrib>Yao, Kui</creatorcontrib><creatorcontrib>Tang, Xiaosong</creatorcontrib><creatorcontrib>He, Xujiang</creatorcontrib><creatorcontrib>Shannigrahi, Santiranjan</creatorcontrib><creatorcontrib>Lou, Yaolong</creatorcontrib><creatorcontrib>Zhang, Jian</creatorcontrib><creatorcontrib>Okada, Kanzo</creatorcontrib><title>A piezoelectric micro-actuator with a three-dimensional structure and its micro-fabrication</title><title>Sensors and actuators. A. Physical.</title><description>Piezoelectric micro-actuators are promising for applications in various servo control systems, with the potential to provide ultra-precision positioning and compensation. In this paper, a micro-actuator, which is configured with an
“H-
shaped” cavity and a pair of high aspect ratio parallel beams, was designed. The micro-actuator with the three-dimensional structure is capable of providing in-plane flexibility and out-of-plane stiffness. Appropriate material processing and batch micro-fabrication schemes were developed to produce the piezoelectric micro-actuator prototypes, involving silicon micro machining, wafer-bonding and integration of piezoelectric thin films. The performance evaluation of the micro-actuator was also conducted. The results demonstrate that a combination of silicon micro-fabrication and piezoelectric thin film deposition is a viable approach to produce miniaturized piezoelectric devices with a complex structure.</description><subject>Micro-actuator</subject><subject>Micro-fabrication</subject><subject>Piezoelectric thin film</subject><subject>Precision positioning</subject><subject>Wafer-bonding</subject><issn>0924-4247</issn><issn>1873-3069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNp9kLtOwzAUQC0EEqXwAWye2BL8ihOLqap4SZVYYGKwHOdadZVHsR0QfD2uysx0l3Ou7j0IXVNSUkLl7a6MoykZIVVJaUlIc4IWtKl5wYlUp2hBFBOFYKI-Rxcx7gghnNf1Ar2v8N7DzwQ92BS8xYO3YSqMTbNJU8BfPm2xwWkbAIrODzBGP42mxzGFOUMBsBk77FP8M51p8xqTMnWJzpzpI1z9zSV6e7h_XT8Vm5fH5_VqU1jOmlRQJU1liHRWStE1QGRTi64CzoxgLWmFlG2lFCPKUccqEK0xwG1lu5ZS5yhfopvj3n2YPmaISQ8-Wuh7M8I0R80UrZmSTQbpEcyHxhjA6X3wgwnfmhJ9yKh3OmfUh4yaUp0zZufu6ED-4NND0NF6GC10PuRkupv8P_Yvz098dA</recordid><startdate>20060814</startdate><enddate>20060814</enddate><creator>Gao, Peng</creator><creator>Yao, Kui</creator><creator>Tang, Xiaosong</creator><creator>He, Xujiang</creator><creator>Shannigrahi, Santiranjan</creator><creator>Lou, Yaolong</creator><creator>Zhang, Jian</creator><creator>Okada, Kanzo</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope></search><sort><creationdate>20060814</creationdate><title>A piezoelectric micro-actuator with a three-dimensional structure and its micro-fabrication</title><author>Gao, Peng ; Yao, Kui ; Tang, Xiaosong ; He, Xujiang ; Shannigrahi, Santiranjan ; Lou, Yaolong ; Zhang, Jian ; Okada, Kanzo</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c328t-196a5a06fc664d8e06874d5e32a42b0b466b599209f1f25e4baae3c5cdb11ff13</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Micro-actuator</topic><topic>Micro-fabrication</topic><topic>Piezoelectric thin film</topic><topic>Precision positioning</topic><topic>Wafer-bonding</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Gao, Peng</creatorcontrib><creatorcontrib>Yao, Kui</creatorcontrib><creatorcontrib>Tang, Xiaosong</creatorcontrib><creatorcontrib>He, Xujiang</creatorcontrib><creatorcontrib>Shannigrahi, Santiranjan</creatorcontrib><creatorcontrib>Lou, Yaolong</creatorcontrib><creatorcontrib>Zhang, Jian</creatorcontrib><creatorcontrib>Okada, Kanzo</creatorcontrib><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Sensors and actuators. A. Physical.</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Gao, Peng</au><au>Yao, Kui</au><au>Tang, Xiaosong</au><au>He, Xujiang</au><au>Shannigrahi, Santiranjan</au><au>Lou, Yaolong</au><au>Zhang, Jian</au><au>Okada, Kanzo</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A piezoelectric micro-actuator with a three-dimensional structure and its micro-fabrication</atitle><jtitle>Sensors and actuators. A. Physical.</jtitle><date>2006-08-14</date><risdate>2006</risdate><volume>130</volume><spage>491</spage><epage>496</epage><pages>491-496</pages><issn>0924-4247</issn><eissn>1873-3069</eissn><abstract>Piezoelectric micro-actuators are promising for applications in various servo control systems, with the potential to provide ultra-precision positioning and compensation. In this paper, a micro-actuator, which is configured with an
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| ispartof | Sensors and actuators. A. Physical., 2006-08, Vol.130, p.491-496 |
| issn | 0924-4247 1873-3069 |
| language | eng |
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| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Micro-actuator Micro-fabrication Piezoelectric thin film Precision positioning Wafer-bonding |
| title | A piezoelectric micro-actuator with a three-dimensional structure and its micro-fabrication |
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