Number density and size distribution of droplets in KrF excimer laser deposited boron carbide films
This paper contributes to the old problem of droplet formation by providing detailed quantitative data on the population statistics of particulates deteriorating the surface of boron carbide films produced by PLD. Films of 180 ± 30 nm thicknesses have been fabricated by KrF excimer laser ablation of...
Gespeichert in:
| Veröffentlicht in: | Applied surface science 2005-07, Vol.247 (1), p.45-50 |
|---|---|
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 50 |
|---|---|
| container_issue | 1 |
| container_start_page | 45 |
| container_title | Applied surface science |
| container_volume | 247 |
| creator | Szörényi, T. Stuck, R. Antoni, F. Fogarassy, E. |
| description | This paper contributes to the old problem of droplet formation by providing detailed quantitative data on the population statistics of particulates deteriorating the surface of boron carbide films produced by PLD. Films of 180
±
30
nm thicknesses have been fabricated by KrF excimer laser ablation of a sintered B
4C target in high vacuum. Number densities and size distributions of the particulates are given for 14 films, deposited at laser fluences tuned between 2 and 14
J
cm
−2, as a result of evaluating SEM images of the same magnification taken from minimum five different areas (altogether (2–4)
×
10
−2
mm
2) of each film. The overwhelming majority of the droplets is small with diameters,
d
≤
1
μm. The number density of those with
d
≤
0.5
μm ranges from (1 to 7)
×
10
4
mm
−2. The effect of gradual deterioration of the target surface as a result of prolonged irradiation screens practically totally the effect of changing fluence. The number of droplets of diameters in excess of 1
μm increases linearly with increasing number of shots/site resulting in maximum surface coverage values as high as 36%. |
| doi_str_mv | 10.1016/j.apsusc.2005.01.092 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_29172773</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0169433205001819</els_id><sourcerecordid>29172773</sourcerecordid><originalsourceid>FETCH-LOGICAL-c367t-3f1fb81dceceec2fa8156b00528927f6b4df3523a6fa5d62a695dbf16504c26b3</originalsourceid><addsrcrecordid>eNp9kEtr3TAQRkVJoDePf9CFNu3Orh62bG8KJSRtSWg3yVroMQJdbMvR2CXJr69ubqC7rGYx53zDfIR84qzmjKuv-9osuKGrBWNtzXjNBvGB7Hjfyapt--aE7Ao2VI2U4iM5Q9wzxkXZ7oj7vU0WMvUwY1yfqZk9xfgC1Edcc7TbGtNMU6A-p2WEFWmc6W2-ofDk4lTE0eCrvqTig6c25SI4k230QEMcJ7wgp8GMCJdv85w83FzfX_2s7v78-HX1_a5yUnVrJQMPtufegQNwIpiet8qWj0Q_iC4o2_ggWyGNCqb1Shg1tN4GrlrWOKGsPCdfjrlLTo8b4KqniA7G0cyQNtRi4J3oOlnA5gi6nBAzBL3kOJn8rDnTh0b1Xh8b1YdGNeO6NFq0z2_5Bp0ZQzazi_jfVX05MHSF-3bkoDz7N0LW6CLMDnzM4FbtU3z_0D8EzpAG</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>29172773</pqid></control><display><type>article</type><title>Number density and size distribution of droplets in KrF excimer laser deposited boron carbide films</title><source>Elsevier ScienceDirect Journals Complete - AutoHoldings</source><creator>Szörényi, T. ; Stuck, R. ; Antoni, F. ; Fogarassy, E.</creator><creatorcontrib>Szörényi, T. ; Stuck, R. ; Antoni, F. ; Fogarassy, E.</creatorcontrib><description>This paper contributes to the old problem of droplet formation by providing detailed quantitative data on the population statistics of particulates deteriorating the surface of boron carbide films produced by PLD. Films of 180
±
30
nm thicknesses have been fabricated by KrF excimer laser ablation of a sintered B
4C target in high vacuum. Number densities and size distributions of the particulates are given for 14 films, deposited at laser fluences tuned between 2 and 14
J
cm
−2, as a result of evaluating SEM images of the same magnification taken from minimum five different areas (altogether (2–4)
×
10
−2
mm
2) of each film. The overwhelming majority of the droplets is small with diameters,
d
≤
1
μm. The number density of those with
d
≤
0.5
μm ranges from (1 to 7)
×
10
4
mm
−2. The effect of gradual deterioration of the target surface as a result of prolonged irradiation screens practically totally the effect of changing fluence. The number of droplets of diameters in excess of 1
μm increases linearly with increasing number of shots/site resulting in maximum surface coverage values as high as 36%.</description><identifier>ISSN: 0169-4332</identifier><identifier>EISSN: 1873-5584</identifier><identifier>DOI: 10.1016/j.apsusc.2005.01.092</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>B 4C ; Boron carbide ; Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Droplets ; Electron and ion emission by liquids and solids; impact phenomena ; Exact sciences and technology ; Histograms ; Impact phenomena (including electron spectra and sputtering) ; Laser deposition ; Laser-beam impact phenomena ; Materials science ; Methods of deposition of films and coatings; film growth and epitaxy ; Particulates ; Physics ; PLD ; Size distribution ; Structure and morphology; thickness ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) ; Thin film structure and morphology ; Thin films</subject><ispartof>Applied surface science, 2005-07, Vol.247 (1), p.45-50</ispartof><rights>2005 Elsevier B.V.</rights><rights>2005 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c367t-3f1fb81dceceec2fa8156b00528927f6b4df3523a6fa5d62a695dbf16504c26b3</citedby><cites>FETCH-LOGICAL-c367t-3f1fb81dceceec2fa8156b00528927f6b4df3523a6fa5d62a695dbf16504c26b3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.apsusc.2005.01.092$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>309,310,314,780,784,789,790,3549,23929,23930,25139,27923,27924,45994</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=16891797$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Szörényi, T.</creatorcontrib><creatorcontrib>Stuck, R.</creatorcontrib><creatorcontrib>Antoni, F.</creatorcontrib><creatorcontrib>Fogarassy, E.</creatorcontrib><title>Number density and size distribution of droplets in KrF excimer laser deposited boron carbide films</title><title>Applied surface science</title><description>This paper contributes to the old problem of droplet formation by providing detailed quantitative data on the population statistics of particulates deteriorating the surface of boron carbide films produced by PLD. Films of 180
±
30
nm thicknesses have been fabricated by KrF excimer laser ablation of a sintered B
4C target in high vacuum. Number densities and size distributions of the particulates are given for 14 films, deposited at laser fluences tuned between 2 and 14
J
cm
−2, as a result of evaluating SEM images of the same magnification taken from minimum five different areas (altogether (2–4)
×
10
−2
mm
2) of each film. The overwhelming majority of the droplets is small with diameters,
d
≤
1
μm. The number density of those with
d
≤
0.5
μm ranges from (1 to 7)
×
10
4
mm
−2. The effect of gradual deterioration of the target surface as a result of prolonged irradiation screens practically totally the effect of changing fluence. The number of droplets of diameters in excess of 1
μm increases linearly with increasing number of shots/site resulting in maximum surface coverage values as high as 36%.</description><subject>B 4C</subject><subject>Boron carbide</subject><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Droplets</subject><subject>Electron and ion emission by liquids and solids; impact phenomena</subject><subject>Exact sciences and technology</subject><subject>Histograms</subject><subject>Impact phenomena (including electron spectra and sputtering)</subject><subject>Laser deposition</subject><subject>Laser-beam impact phenomena</subject><subject>Materials science</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Particulates</subject><subject>Physics</subject><subject>PLD</subject><subject>Size distribution</subject><subject>Structure and morphology; thickness</subject><subject>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><subject>Thin film structure and morphology</subject><subject>Thin films</subject><issn>0169-4332</issn><issn>1873-5584</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNp9kEtr3TAQRkVJoDePf9CFNu3Orh62bG8KJSRtSWg3yVroMQJdbMvR2CXJr69ubqC7rGYx53zDfIR84qzmjKuv-9osuKGrBWNtzXjNBvGB7Hjfyapt--aE7Ao2VI2U4iM5Q9wzxkXZ7oj7vU0WMvUwY1yfqZk9xfgC1Edcc7TbGtNMU6A-p2WEFWmc6W2-ofDk4lTE0eCrvqTig6c25SI4k230QEMcJ7wgp8GMCJdv85w83FzfX_2s7v78-HX1_a5yUnVrJQMPtufegQNwIpiet8qWj0Q_iC4o2_ggWyGNCqb1Shg1tN4GrlrWOKGsPCdfjrlLTo8b4KqniA7G0cyQNtRi4J3oOlnA5gi6nBAzBL3kOJn8rDnTh0b1Xh8b1YdGNeO6NFq0z2_5Bp0ZQzazi_jfVX05MHSF-3bkoDz7N0LW6CLMDnzM4FbtU3z_0D8EzpAG</recordid><startdate>20050715</startdate><enddate>20050715</enddate><creator>Szörényi, T.</creator><creator>Stuck, R.</creator><creator>Antoni, F.</creator><creator>Fogarassy, E.</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20050715</creationdate><title>Number density and size distribution of droplets in KrF excimer laser deposited boron carbide films</title><author>Szörényi, T. ; Stuck, R. ; Antoni, F. ; Fogarassy, E.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c367t-3f1fb81dceceec2fa8156b00528927f6b4df3523a6fa5d62a695dbf16504c26b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><topic>B 4C</topic><topic>Boron carbide</topic><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Droplets</topic><topic>Electron and ion emission by liquids and solids; impact phenomena</topic><topic>Exact sciences and technology</topic><topic>Histograms</topic><topic>Impact phenomena (including electron spectra and sputtering)</topic><topic>Laser deposition</topic><topic>Laser-beam impact phenomena</topic><topic>Materials science</topic><topic>Methods of deposition of films and coatings; film growth and epitaxy</topic><topic>Particulates</topic><topic>Physics</topic><topic>PLD</topic><topic>Size distribution</topic><topic>Structure and morphology; thickness</topic><topic>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</topic><topic>Thin film structure and morphology</topic><topic>Thin films</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Szörényi, T.</creatorcontrib><creatorcontrib>Stuck, R.</creatorcontrib><creatorcontrib>Antoni, F.</creatorcontrib><creatorcontrib>Fogarassy, E.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Applied surface science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Szörényi, T.</au><au>Stuck, R.</au><au>Antoni, F.</au><au>Fogarassy, E.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Number density and size distribution of droplets in KrF excimer laser deposited boron carbide films</atitle><jtitle>Applied surface science</jtitle><date>2005-07-15</date><risdate>2005</risdate><volume>247</volume><issue>1</issue><spage>45</spage><epage>50</epage><pages>45-50</pages><issn>0169-4332</issn><eissn>1873-5584</eissn><abstract>This paper contributes to the old problem of droplet formation by providing detailed quantitative data on the population statistics of particulates deteriorating the surface of boron carbide films produced by PLD. Films of 180
±
30
nm thicknesses have been fabricated by KrF excimer laser ablation of a sintered B
4C target in high vacuum. Number densities and size distributions of the particulates are given for 14 films, deposited at laser fluences tuned between 2 and 14
J
cm
−2, as a result of evaluating SEM images of the same magnification taken from minimum five different areas (altogether (2–4)
×
10
−2
mm
2) of each film. The overwhelming majority of the droplets is small with diameters,
d
≤
1
μm. The number density of those with
d
≤
0.5
μm ranges from (1 to 7)
×
10
4
mm
−2. The effect of gradual deterioration of the target surface as a result of prolonged irradiation screens practically totally the effect of changing fluence. The number of droplets of diameters in excess of 1
μm increases linearly with increasing number of shots/site resulting in maximum surface coverage values as high as 36%.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.apsusc.2005.01.092</doi><tpages>6</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0169-4332 |
| ispartof | Applied surface science, 2005-07, Vol.247 (1), p.45-50 |
| issn | 0169-4332 1873-5584 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_29172773 |
| source | Elsevier ScienceDirect Journals Complete - AutoHoldings |
| subjects | B 4C Boron carbide Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Droplets Electron and ion emission by liquids and solids impact phenomena Exact sciences and technology Histograms Impact phenomena (including electron spectra and sputtering) Laser deposition Laser-beam impact phenomena Materials science Methods of deposition of films and coatings film growth and epitaxy Particulates Physics PLD Size distribution Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Thin films |
| title | Number density and size distribution of droplets in KrF excimer laser deposited boron carbide films |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-08T14%3A08%3A15IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Number%20density%20and%20size%20distribution%20of%20droplets%20in%20KrF%20excimer%20laser%20deposited%20boron%20carbide%20films&rft.jtitle=Applied%20surface%20science&rft.au=Sz%C3%B6r%C3%A9nyi,%20T.&rft.date=2005-07-15&rft.volume=247&rft.issue=1&rft.spage=45&rft.epage=50&rft.pages=45-50&rft.issn=0169-4332&rft.eissn=1873-5584&rft_id=info:doi/10.1016/j.apsusc.2005.01.092&rft_dat=%3Cproquest_cross%3E29172773%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=29172773&rft_id=info:pmid/&rft_els_id=S0169433205001819&rfr_iscdi=true |