Plasma Chemistry in an Atmospheric Pressure Ar/NH3 Dielectric Barrier Discharge

An atmospheric pressure dielectric barrier discharge (DBD) in Ar/NH3 (0.1–10%) mixtures with a parallel plate electrode geometry was studied. The plasma was investigated by emission and absorption spectroscopy in the UV spectral range. Discharge current and voltage were measured as well. UV absorpti...

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Veröffentlicht in:Plasma processes and polymers 2005-03, Vol.2 (3), p.193-200
Hauptverfasser: Fateev, Alexander, Leipold, Frank, Kusano, Yukihiro, Stenum, Bjarne, Tsakadze, Erekle, Bindslev, Henrik
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Sprache:eng
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