Nano Scale Material Property Measurement of MEMS Material Using Piezo Actuated Material Testing Machine

Many micro technology researches have been concentrated in the field of materials and a process field. But the properties of micro materials should be understood to give still more advanced results. Among the various material properties, mechanical material properties such as tensile strength, elastic modulus, etc., is the basic property. To measure mechanical properties in micro or nano scale, actuating must be very precise. Piezo is a famous actuator, frequently used to measure very precise mechanical properties in micro research field. But piezo has a nonlinearity called hysteresis. Not precision result is caused because of this hysteresis property in piezo actuator. Therefore feedback control method is used in many researches to prevent this hysteresis of piezo actuator. Feedback control method produces a good result in processing view, but causes a loss in a resolution view. In this paper, hysteresis is compensated by using an open loop control method. To apply the open loop control method to piezo actuated nano scale material testing machine, hysteresis property is modeled in a mathematical function, and a compensated control input is constructed using inverse function of original data. The reliability of this control method can be confirmed by testing nickel, aluminum, and copper micro thin foil that is used in MEMS material broadly. If these MEMS material properties are used in a MEMS research field, more economical and high performance MEMS materials can be obtained.