Capacitively coupled plasma source operating in Xe/Ar mixtures

The parameters of a capacitively coupled plasma source operating in Xe/Ar mixtures have been studied using particle-in-cell/Monte Carlo methods. The plasma density, ion energy distributions (IEDs) for different sorts of ions, ion current densities, energy delivered by ions to the electrodes and othe...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2005-01, Vol.38 (2), p.287-299
Hauptverfasser:	Yu Babaeva, N, Lee, J K, Shon, J W
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Monte carlo methods Particle-in-cell method Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma simulation
Online-Zugang:	Volltext
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