Composition and formation mechanism of zirconium oxynitride films produced by reactive direct current magnetron sputtering

Direct current magnetron sputtered zirconium oxynitride films show an improvement in both deposition rate and physical properties compared to zirconium oxide. Here we seek to understand these beneficial effects and report on the film composition and crystallographic structure. Based on a thermochemi...

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Veröffentlicht in:	Physica status solidi. A, Applied research Applied research, 2004-04, Vol.201 (5), p.967-976
Hauptverfasser:	Ngaruiya, J. M., Kappertz, O., Liesch, C., Müller, P., Dronskowski, R., Wuttig, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	61.10.Nz 68.55.Nq 81.15.Aa 81.15.Cd Exact sciences and technology Physics
Online-Zugang:	Volltext
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