Electrical Characteristics and Reliability of 4H-SiC PiN Diodes Fabricated on In-House Grown and Commercial Epitaxial Films

4H-SiC pin diodes fabricated on epitaxial films grown in-house on various substrates along with devices fabricated on commercial epi-material are presented. Defects have been observed using electroluminescence imaging and are correlated with device electrical performance. Most diodes fabricated with...

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Veröffentlicht in:	Materials Science Forum 2005-05, Vol.483-485, p.961-964
Hauptverfasser:	Li, Can Hua, Gutmann, Ronald J., Bhat, I., Seiler, Joseph, Stahlbush, Robert E., Chow, T. Paul, Losee, Peter A.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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