Development of a Sensitive Probe for Coordinate Measuring Machines
Requirement for precision measurement becomes extremely advanced as industrial needs advances. CMM (Coordinate Measuring Machine) is one of the most adequate measuring machines to meet the requirement. As the precision of CMM becomes higher, it is important to improve the sensitivity of probe. We de...
Gespeichert in:
| Veröffentlicht in: | Key Engineering Materials 2005-10, Vol.295-296, p.325-330 |
|---|---|
| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 330 |
|---|---|
| container_issue | |
| container_start_page | 325 |
| container_title | Key Engineering Materials |
| container_volume | 295-296 |
| creator | Furutani, Ryoshu Watanabe, M. |
| description | Requirement for precision measurement becomes extremely advanced as industrial needs advances. CMM (Coordinate Measuring Machine) is one of the most adequate measuring machines to meet the requirement. As the precision of CMM becomes higher, it is important to improve the sensitivity of probe. We developed a contact type probe which consisted of a QPD (quadratic photo
diode), a ball lens, and a laser diode to detect the displacement of stylus. The probe system has a resolution of 31nm. |
| doi_str_mv | 10.4028/www.scientific.net/KEM.295-296.325 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_29131194</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>29131194</sourcerecordid><originalsourceid>FETCH-LOGICAL-c367t-7d6bcebdacf4eb4a5bd2e06f8d969d931ea9b1c80f7e3616edb02f8b8e24d3fc3</originalsourceid><addsrcrecordid>eNqVkEtLAzEUhYMPsFX_w6xcCDPmMZNJltrWB1oU1HXIZG400iY1mbb4741UcO3ichb38MH5EDonuKoxFRfb7bZKxoEfnHWm8jBc3M_mFZVNSSWvGG320IhwTkvZymYfjbFoRS1l2_KD_MCElVJQfoTGKX1gzIggzQhdTWEDi7BaZm4RbKGLZ_DJDW4DxVMMHRQ2xGISQuyd1wMUc9BpHZ1_K-bavDsP6QQdWr1IcPqbx-j1evYyuS0fHm_uJpcPpWG8Hcq2552BrtfG1tDVuul6Cphb0Usue8kIaNkRI7BtgXHCoe8wtaITQOueWcOO0dmOu4rhcw1pUEuXDCwW2kNYJ0UlYYTIOhevdkUTQ0oRrFpFt9TxSxGsflyq7FL9uVTZpcouM6HJx1V2mSHTHWSI2qcBzLv6COvo88L_YL4BOs6HOg</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>29131194</pqid></control><display><type>article</type><title>Development of a Sensitive Probe for Coordinate Measuring Machines</title><source>Scientific.net Journals</source><creator>Furutani, Ryoshu ; Watanabe, M.</creator><creatorcontrib>Furutani, Ryoshu ; Watanabe, M.</creatorcontrib><description>Requirement for precision measurement becomes extremely advanced as industrial needs advances. CMM (Coordinate Measuring Machine) is one of the most adequate measuring machines to meet the requirement. As the precision of CMM becomes higher, it is important to improve the sensitivity of probe. We developed a contact type probe which consisted of a QPD (quadratic photo
diode), a ball lens, and a laser diode to detect the displacement of stylus. The probe system has a resolution of 31nm.</description><identifier>ISSN: 1013-9826</identifier><identifier>ISSN: 1662-9795</identifier><identifier>ISBN: 0878499776</identifier><identifier>ISBN: 9780878499779</identifier><identifier>EISSN: 1662-9795</identifier><identifier>DOI: 10.4028/www.scientific.net/KEM.295-296.325</identifier><language>eng</language><publisher>Trans Tech Publications Ltd</publisher><ispartof>Key Engineering Materials, 2005-10, Vol.295-296, p.325-330</ispartof><rights>2005 Trans Tech Publications Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c367t-7d6bcebdacf4eb4a5bd2e06f8d969d931ea9b1c80f7e3616edb02f8b8e24d3fc3</citedby><cites>FETCH-LOGICAL-c367t-7d6bcebdacf4eb4a5bd2e06f8d969d931ea9b1c80f7e3616edb02f8b8e24d3fc3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttps://www.scientific.net/Image/TitleCover/527?width=600</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Furutani, Ryoshu</creatorcontrib><creatorcontrib>Watanabe, M.</creatorcontrib><title>Development of a Sensitive Probe for Coordinate Measuring Machines</title><title>Key Engineering Materials</title><description>Requirement for precision measurement becomes extremely advanced as industrial needs advances. CMM (Coordinate Measuring Machine) is one of the most adequate measuring machines to meet the requirement. As the precision of CMM becomes higher, it is important to improve the sensitivity of probe. We developed a contact type probe which consisted of a QPD (quadratic photo
diode), a ball lens, and a laser diode to detect the displacement of stylus. The probe system has a resolution of 31nm.</description><issn>1013-9826</issn><issn>1662-9795</issn><issn>1662-9795</issn><isbn>0878499776</isbn><isbn>9780878499779</isbn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNqVkEtLAzEUhYMPsFX_w6xcCDPmMZNJltrWB1oU1HXIZG400iY1mbb4741UcO3ichb38MH5EDonuKoxFRfb7bZKxoEfnHWm8jBc3M_mFZVNSSWvGG320IhwTkvZymYfjbFoRS1l2_KD_MCElVJQfoTGKX1gzIggzQhdTWEDi7BaZm4RbKGLZ_DJDW4DxVMMHRQ2xGISQuyd1wMUc9BpHZ1_K-bavDsP6QQdWr1IcPqbx-j1evYyuS0fHm_uJpcPpWG8Hcq2552BrtfG1tDVuul6Cphb0Usue8kIaNkRI7BtgXHCoe8wtaITQOueWcOO0dmOu4rhcw1pUEuXDCwW2kNYJ0UlYYTIOhevdkUTQ0oRrFpFt9TxSxGsflyq7FL9uVTZpcouM6HJx1V2mSHTHWSI2qcBzLv6COvo88L_YL4BOs6HOg</recordid><startdate>200510</startdate><enddate>200510</enddate><creator>Furutani, Ryoshu</creator><creator>Watanabe, M.</creator><general>Trans Tech Publications Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>200510</creationdate><title>Development of a Sensitive Probe for Coordinate Measuring Machines</title><author>Furutani, Ryoshu ; Watanabe, M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c367t-7d6bcebdacf4eb4a5bd2e06f8d969d931ea9b1c80f7e3616edb02f8b8e24d3fc3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Furutani, Ryoshu</creatorcontrib><creatorcontrib>Watanabe, M.</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Key Engineering Materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Furutani, Ryoshu</au><au>Watanabe, M.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Development of a Sensitive Probe for Coordinate Measuring Machines</atitle><jtitle>Key Engineering Materials</jtitle><date>2005-10</date><risdate>2005</risdate><volume>295-296</volume><spage>325</spage><epage>330</epage><pages>325-330</pages><issn>1013-9826</issn><issn>1662-9795</issn><eissn>1662-9795</eissn><isbn>0878499776</isbn><isbn>9780878499779</isbn><abstract>Requirement for precision measurement becomes extremely advanced as industrial needs advances. CMM (Coordinate Measuring Machine) is one of the most adequate measuring machines to meet the requirement. As the precision of CMM becomes higher, it is important to improve the sensitivity of probe. We developed a contact type probe which consisted of a QPD (quadratic photo
diode), a ball lens, and a laser diode to detect the displacement of stylus. The probe system has a resolution of 31nm.</abstract><pub>Trans Tech Publications Ltd</pub><doi>10.4028/www.scientific.net/KEM.295-296.325</doi><tpages>6</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 1013-9826 |
| ispartof | Key Engineering Materials, 2005-10, Vol.295-296, p.325-330 |
| issn | 1013-9826 1662-9795 1662-9795 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_29131194 |
| source | Scientific.net Journals |
| title | Development of a Sensitive Probe for Coordinate Measuring Machines |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-21T08%3A16%3A14IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Development%20of%20a%20Sensitive%20Probe%20for%20Coordinate%20Measuring%20Machines&rft.jtitle=Key%20Engineering%20Materials&rft.au=Furutani,%20Ryoshu&rft.date=2005-10&rft.volume=295-296&rft.spage=325&rft.epage=330&rft.pages=325-330&rft.issn=1013-9826&rft.eissn=1662-9795&rft.isbn=0878499776&rft.isbn_list=9780878499779&rft_id=info:doi/10.4028/www.scientific.net/KEM.295-296.325&rft_dat=%3Cproquest_cross%3E29131194%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=29131194&rft_id=info:pmid/&rfr_iscdi=true |