Accurate and traceable measurement of nano- and microstructures

Accurate and traceable measurement of nano- and microstructures

An approach to establishing rigorous nano- and microdimensional metrology using scanning probe microscopes (SPMs) and metrological profilometers is presented. An overview on calibrations of nanostructures-such as step height, one- and two-dimensional gratings, feature width, nanoroughness and geomet...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Measurement science & technology 2006-03, Vol.17 (3), p.545-552
Hauptverfasser: Dai, Gaoliang, Pohlenz, Frank, Xu, Min, Koenders, Ludger, Danzebrink, Hans-Ulrich, Wilkening, Gunter
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 552
container_issue 3
container_start_page 545
container_title Measurement science & technology
container_volume 17
creator Dai, Gaoliang
Pohlenz, Frank
Xu, Min
Koenders, Ludger
Danzebrink, Hans-Ulrich
Wilkening, Gunter
description An approach to establishing rigorous nano- and microdimensional metrology using scanning probe microscopes (SPMs) and metrological profilometers is presented. An overview on calibrations of nanostructures-such as step height, one- and two-dimensional gratings, feature width, nanoroughness and geometry of a nanohardness indenter-and microstructures-such as microgroove, microroughness and geometry of a macrohardness indenter-is given in this paper.
doi_str_mv 10.1088/0957-0233/17/3/S15
format Article
fullrecord <record><control><sourceid>proquest</sourceid><recordid>TN_cdi_proquest_miscellaneous_29115565</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>29115565</sourcerecordid><originalsourceid>FETCH-LOGICAL-p116t-d79aa47a8db24a68314c83b685ffc44122bb623bbbf75d51593f0c05b6bb91ba3</originalsourceid><addsrcrecordid>eNo9jLtKBDEUQIMouK7-gNVUdnFyk8mrkmXxBQsWar3cm0lgZR5rkvl_RcXqFOdwGLsGcQvCuVZ4bbmQSrVgW9W-gj5hK1AGuNECTtnqPzhnF6V8CCGs8H7F7jYhLBlrbHDqm5oxRKQhNmPEsuQ4xqk2c2omnGb-k4yHkOdS8xLqty-X7CzhUOLVH9fs_eH-bfvEdy-Pz9vNjh8BTOW99YidRdeT7NA4BV1wiozTKYWuAymJjFRElKzuNWivkghCkyHyQKjW7Ob3e8zz5xJL3Y-HEuIw4BTnpeylB9DaaPUFDplNTA</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>29115565</pqid></control><display><type>article</type><title>Accurate and traceable measurement of nano- and microstructures</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Dai, Gaoliang ; Pohlenz, Frank ; Xu, Min ; Koenders, Ludger ; Danzebrink, Hans-Ulrich ; Wilkening, Gunter</creator><creatorcontrib>Dai, Gaoliang ; Pohlenz, Frank ; Xu, Min ; Koenders, Ludger ; Danzebrink, Hans-Ulrich ; Wilkening, Gunter</creatorcontrib><description>An approach to establishing rigorous nano- and microdimensional metrology using scanning probe microscopes (SPMs) and metrological profilometers is presented. An overview on calibrations of nanostructures-such as step height, one- and two-dimensional gratings, feature width, nanoroughness and geometry of a nanohardness indenter-and microstructures-such as microgroove, microroughness and geometry of a macrohardness indenter-is given in this paper.</description><identifier>ISSN: 0957-0233</identifier><identifier>EISSN: 1361-6501</identifier><identifier>DOI: 10.1088/0957-0233/17/3/S15</identifier><language>eng</language><ispartof>Measurement science &amp; technology, 2006-03, Vol.17 (3), p.545-552</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27903,27904</link.rule.ids></links><search><creatorcontrib>Dai, Gaoliang</creatorcontrib><creatorcontrib>Pohlenz, Frank</creatorcontrib><creatorcontrib>Xu, Min</creatorcontrib><creatorcontrib>Koenders, Ludger</creatorcontrib><creatorcontrib>Danzebrink, Hans-Ulrich</creatorcontrib><creatorcontrib>Wilkening, Gunter</creatorcontrib><title>Accurate and traceable measurement of nano- and microstructures</title><title>Measurement science &amp; technology</title><description>An approach to establishing rigorous nano- and microdimensional metrology using scanning probe microscopes (SPMs) and metrological profilometers is presented. An overview on calibrations of nanostructures-such as step height, one- and two-dimensional gratings, feature width, nanoroughness and geometry of a nanohardness indenter-and microstructures-such as microgroove, microroughness and geometry of a macrohardness indenter-is given in this paper.</description><issn>0957-0233</issn><issn>1361-6501</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNo9jLtKBDEUQIMouK7-gNVUdnFyk8mrkmXxBQsWar3cm0lgZR5rkvl_RcXqFOdwGLsGcQvCuVZ4bbmQSrVgW9W-gj5hK1AGuNECTtnqPzhnF6V8CCGs8H7F7jYhLBlrbHDqm5oxRKQhNmPEsuQ4xqk2c2omnGb-k4yHkOdS8xLqty-X7CzhUOLVH9fs_eH-bfvEdy-Pz9vNjh8BTOW99YidRdeT7NA4BV1wiozTKYWuAymJjFRElKzuNWivkghCkyHyQKjW7Ob3e8zz5xJL3Y-HEuIw4BTnpeylB9DaaPUFDplNTA</recordid><startdate>20060301</startdate><enddate>20060301</enddate><creator>Dai, Gaoliang</creator><creator>Pohlenz, Frank</creator><creator>Xu, Min</creator><creator>Koenders, Ludger</creator><creator>Danzebrink, Hans-Ulrich</creator><creator>Wilkening, Gunter</creator><scope>8FD</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20060301</creationdate><title>Accurate and traceable measurement of nano- and microstructures</title><author>Dai, Gaoliang ; Pohlenz, Frank ; Xu, Min ; Koenders, Ludger ; Danzebrink, Hans-Ulrich ; Wilkening, Gunter</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-p116t-d79aa47a8db24a68314c83b685ffc44122bb623bbbf75d51593f0c05b6bb91ba3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Dai, Gaoliang</creatorcontrib><creatorcontrib>Pohlenz, Frank</creatorcontrib><creatorcontrib>Xu, Min</creatorcontrib><creatorcontrib>Koenders, Ludger</creatorcontrib><creatorcontrib>Danzebrink, Hans-Ulrich</creatorcontrib><creatorcontrib>Wilkening, Gunter</creatorcontrib><collection>Technology Research Database</collection><collection>ANTE: Abstracts in New Technology &amp; Engineering</collection><collection>Engineering Research Database</collection><jtitle>Measurement science &amp; technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Dai, Gaoliang</au><au>Pohlenz, Frank</au><au>Xu, Min</au><au>Koenders, Ludger</au><au>Danzebrink, Hans-Ulrich</au><au>Wilkening, Gunter</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Accurate and traceable measurement of nano- and microstructures</atitle><jtitle>Measurement science &amp; technology</jtitle><date>2006-03-01</date><risdate>2006</risdate><volume>17</volume><issue>3</issue><spage>545</spage><epage>552</epage><pages>545-552</pages><issn>0957-0233</issn><eissn>1361-6501</eissn><abstract>An approach to establishing rigorous nano- and microdimensional metrology using scanning probe microscopes (SPMs) and metrological profilometers is presented. An overview on calibrations of nanostructures-such as step height, one- and two-dimensional gratings, feature width, nanoroughness and geometry of a nanohardness indenter-and microstructures-such as microgroove, microroughness and geometry of a macrohardness indenter-is given in this paper.</abstract><doi>10.1088/0957-0233/17/3/S15</doi><tpages>8</tpages></addata></record>
fulltext fulltext
identifier ISSN: 0957-0233
ispartof Measurement science & technology, 2006-03, Vol.17 (3), p.545-552
issn 0957-0233
1361-6501
language eng
recordid cdi_proquest_miscellaneous_29115565
source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
title Accurate and traceable measurement of nano- and microstructures
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-25T16%3A27%3A58IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Accurate%20and%20traceable%20measurement%20of%20nano-%20and%20microstructures&rft.jtitle=Measurement%20science%20&%20technology&rft.au=Dai,%20Gaoliang&rft.date=2006-03-01&rft.volume=17&rft.issue=3&rft.spage=545&rft.epage=552&rft.pages=545-552&rft.issn=0957-0233&rft.eissn=1361-6501&rft_id=info:doi/10.1088/0957-0233/17/3/S15&rft_dat=%3Cproquest%3E29115565%3C/proquest%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=29115565&rft_id=info:pmid/&rfr_iscdi=true