Boron nitride phosphide thin films grown on quartz substrate by hot-filament and plasma-assisted chemical vapor deposition

Boron nitride phosphide films are, for the first time, grown on transparent quartz substrate by hot filament and radio‐frequency plasma co‐assisted chemical vapor deposition technique. XPS, XRD, SEM, and UV measurements are performed to study the chemical composition, crystallization, microstructure...

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Veröffentlicht in:	Physica status solidi. A, Applied research Applied research, 2004-10, Vol.201 (13), p.2922-2928
Hauptverfasser:	Zhang, X. W., Xu, S. Y., Han, G. R.
Format:	Artikel
Sprache:	eng
Schlagworte:	61.10.Nz 68.55.Jk 78.66.Fd 79.60.Dp 81.15.Gh Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Optical properties of specific thin films, surfaces, and low-dimensional structures Physics
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