Exploration of fs-laser ablation parameter space for 2D/3D imaging of soft and hard materials by tri-beam microscopy

Tri-beam microscopes comprising a fs-laser beam, a Xe+ plasma focused ion beam (PFIB) and an electron beam all in one chamber open up exciting opportunities for site-specific correlative microscopy. They offer the possibility of rapid ablation and material removal by fs-laser, subsequent polishing b...

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Veröffentlicht in:	Ultramicroscopy 2024-03, Vol.257, p.113903-113903, Article 113903
Hauptverfasser:	Gholinia, A, Donoghue, J, Garner, A, Curd, M, Lawson, M J, Winiarski, B, Geurts, R, Withers, P J, Burnett, T L
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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