The influence of substrate temperature on the properties of aluminum-doped zinc oxide thin films deposited by DC magnetron sputtering

Transparent, conducting, aluminum-doped zinc oxide (AZO) thin films were deposited on Corning 1737 glass by a DC magnetron sputter. The structural, electrical, and optical properties of the films, deposited using various substrate temperatures, were investigated. The AZO thin films were fabricated w...

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Veröffentlicht in:	Journal of materials science. Materials in electronics 2006-12, Vol.17 (12), p.973-977
Hauptverfasser:	MOON, Yeon-Keon, KIM, Se-Hyun, PARK, Jong-Wan
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Applied sciences Azo Deposition Direct current Electronics Exact sciences and technology Magnetron sputtering Materials Solar energy Thin films Zinc oxide
Online-Zugang:	Volltext
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