Optical characterization of sol–gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions

In this paper the results concerning the optical characterization of the PZT film are presented. The multi-sample modification of the optical method based on combining variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry is used to obtain the spectral dependences of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Applied surface science 2005-05, Vol.244 (1), p.338-342
Hauptverfasser:	Franta, Daniel, Ohlídal, Ivan, Mistrík, Jan, Yamaguchi, Tomuo, Hu, Gu Jin, Dai, Ning
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Dielectric, piezoelectric, ferroelectric and antiferroelectric materials Dielectrics, piezoelectrics, and ferroelectrics and their properties Ellipsometry Exact sciences and technology Niobates, titanates, tantalates, pzt ceramics, etc Optical constants Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity) Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of bulk materials and thin films Physics PZT films Reflectometry
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!