Processing techniques for refractory integrated circuits superconducting

Processing techniques have been developed to increase yields and uniformity in superconductor integrated circuits fabricated with refractory materials. An eight-level process was used to define a ground plane, ground plane insulator, Josephson junction base and counterelectrodes, a second insulator...

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Veröffentlicht in:	IEEE transactions on magnetics 1989-03, Vol.25 (2), p.1127-1130
Hauptverfasser:	Przybysz, J X, Blaugher, R D, Buttyan, J
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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