Electrification of polymer surface caused by sliding ultrapure water

It has been thought that the conductivity of pure water is high enough to neglect the streaming electrification. However, with the recent advancement of semiconductor industries, ultrapure water appeared to cause electrification problems at the washing and the rinsing processes of semiconductor wafe...

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Veröffentlicht in:	IEEE transactions on industry applications 1996-07, Vol.32 (4), p.825-831
Hauptverfasser:	Yatsuzuka, K., Higashiyama, Y., Asano, K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Conductivity Dielectric liquids Dielectrics and electrical insulation Industry Applications Society Mirrors Petroleum Plastic insulation Polymers Streaming media Surface discharges
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