High-power microwave GaN/AlGaN HEMTs on semi-insulating silicon carbide substrates

Record performance of high-power GaN/Al/sub 0.14/-Ga/sub 0.86/N high-electron mobility transistors (HEMTs) fabricated on semi-insulating (SI) 4H-SiC substrates is reported. Devices of 0.125-0.25 mm gate periphery show high CW power densities between 5.3 and 6.9 W/mm, with a typical power-added effic...

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Veröffentlicht in:IEEE electron device letters 1999-04, Vol.20 (4), p.161-163
Hauptverfasser: Sheppard, S.T., Doverspike, K., Pribble, W.L., Allen, S.T., Palmour, J.W., Kehias, L.T., Jenkins, T.J.
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container_end_page 163
container_issue 4
container_start_page 161
container_title IEEE electron device letters
container_volume 20
creator Sheppard, S.T.
Doverspike, K.
Pribble, W.L.
Allen, S.T.
Palmour, J.W.
Kehias, L.T.
Jenkins, T.J.
description Record performance of high-power GaN/Al/sub 0.14/-Ga/sub 0.86/N high-electron mobility transistors (HEMTs) fabricated on semi-insulating (SI) 4H-SiC substrates is reported. Devices of 0.125-0.25 mm gate periphery show high CW power densities between 5.3 and 6.9 W/mm, with a typical power-added efficiency (PAE) of 35.4% and an associated gain of 9.2 dB at 10 GHz. High-electron mobility transistors with 1.5-mm gate widths (12×125 μm), measured on-wafer, exhibit a total output power of 3.9 W CW (2.6 W/mm) at 10 GHz with a PAE of 29% and an associated gain of 10 dB at the -2 dB compression point. A 3-mm HEMT, packaged with a hybrid matching circuit, demonstrated 9.1 W CW at 7.4 GHz with a PAE of 29.6% and a gain of 7.1 dB. These data represent the highest power density, total power, and associated gain demonstrated for a III-nitride HEMT under RF drive.
doi_str_mv 10.1109/55.753753
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subjects Aluminum gallium nitride
Density
Devices
Gain
Gain measurement
Gallium nitride
Gallium nitrides
HEMTs
High electron mobility transistors
Microwave devices
MODFETs
Noise levels
Packaging
Power generation
Power measurement
Semiconductor devices
Silicon
Silicon substrates
title High-power microwave GaN/AlGaN HEMTs on semi-insulating silicon carbide substrates
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