Growth of MgxZn1-xO films using remote plasma MOCVD

MgrZn1-xO films were successfully grown on a-plane sapphire (1 1 2 0) substrates by remote plasma enhanced metalorganic chemical vapor deposition (RPE-MOCVD). Diethyl zinc (DEZn), bis-ethylcyclopentadienyl magnesium (EtCp2Mg) and oxygen plasma were used as source materials. By increasing Mg content...

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Veröffentlicht in:	Applied surface science 2005-05, Vol.244 (1-4), p.385-388
Hauptverfasser:	NAKAMURA, Atsushi, ISHIHARA, Junji, SHIGEMORI, Satoshi, AOKI, Toru, TEMMYO, Jiro
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity) Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of bulk materials and thin films Photoluminescence Physics
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