Growth and characterization of a-axis textured ZnO thin films

Smooth a-axis oriented ZnO thin films are grown on (0 0 1) MgO substrates by pulsed laser deposition assisted by a very directional radio frequency oxygen plasma. The structure of the film is examined by X-ray diffraction, electron diffraction and high resolution electron microscopy. The film grows...

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Veröffentlicht in:	Journal of crystal growth 2005-04, Vol.277 (1), p.26-31
Hauptverfasser:	Nistor, L.C., Ghica, C., Matei, D., Dinescu, G., Dinescu, M., Van Tendeloo, G.
Format:	Artikel
Sprache:	eng
Schlagworte:	A1. Characterization A3. Plasma assited laser deposition B1. ZnO B2. Piezoelectric materials Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Laser deposition Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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