Estimation of Young's Modulus for Polysilicon Thin Film by Finite Element Analysis

The Young's modulus of a polysilicon thin microelement was evaluated using the previously developed mechanical testing system for thin tensile microelements. The tested part of the specimen is 250 μm in length, 10 μm in width, 3.8 μm in thickness. The Young's modulus of the tested polysili...

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Veröffentlicht in:	Journal of the Society of Materials Science, Japan Japan, 2005, Vol.54(10), pp.1016-1021
Hauptverfasser:	TANAKA, Kazuto, MINOSHIMA, Kohji, IMOTO, Takehiro
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	Crystal orientation Finite element analysis MEMS Polysilicon thin film Tensile test Voronoi structure Young's modulus
Online-Zugang:	Volltext
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