Successive deposition of layered titanium oxide/indium tin oxide films on unheated substrates by twin direct current magnetron sputtering

Layered titanium oxide/indium tin oxide (TiO 2/ITO) films were successively deposited on unheated glass substrates in situ using a twin direct current magnetron sputtering system. The layered TiO 2/ITO films exhibited a strongly polycrystalline structure that comprises anatase and rutile phases, as...

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Veröffentlicht in:	Thin solid films 2006-04, Vol.500 (1), p.110-116
Hauptverfasser:	Wu, Kee-Rong, Ting, Chieh-Hung, Liu, Wu-Chien, Lin, Chao-Hsien, Wu, Jiing-Kae
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Indium tin oxide Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Sputtering Surface roughness Titanium oxide
Online-Zugang:	Volltext
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