Nb/Al-AlOx/Nb edge junctions for distributed mixers

We have fabricated high quality Nb/Al-oxide/Al/Nb edge junctions using a Nb/SiO/sub 2/ bi-layer film as the base electrode, suitable for use as traveling wave mixers. An edge is cut in the bi-layer with an ion gun at a 45 degree angle using a photoresist mask. The wafer is then cleaned in-situ with...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 1999-06, Vol.9 (2), p.3878-3881
Hauptverfasser:	Amos, R.S., Lichtenberger, A.W., Tong, C.E., Blundell, R., Pan, S.-K., Kerr, A.R.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Applied sciences Cleaning Counting circuits Devices Electric variables Electrodes Electronics Etching Exact sciences and technology Mixers Niobium Plasma applications Plasma temperature Proximity effect Resists Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Superconducting devices Traveling waves Wet etching
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