Effect of Si doping on the wear properties of CrN coatings synthesized by unbalanced magnetron sputtering

In this study, Cr–Si–N coatings were deposited on the pump parts made of AISI 4340 steel in order to improve wear characteristics of electro hydrostatic actuator (EHA) hydraulic pump parts. Coatings with various Si contents were synthesized by unbalanced magnetron sputtering method and their chemica...

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Veröffentlicht in:Thin solid films 2006-05, Vol.506 (Complete), p.192-196
Hauptverfasser: Lee, Sang Yul, Kim, BomSok, Kim, Sung Dea, Kim, GwangSeok, Hong, Yeh Sun
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Sprache:eng
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