Impact of interface impurities on heterostructure field-effect transistors

The influence of C and Si impurities at the substrate/epitaxy interface on the threshold voltage of GaAs/AlGaAs selectively doped heterostructure transistors has been investigated both experimentally and theoretically using a one-dimensional simulation. The presence of C raises the conduction band r...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on electron devices 1992-11, Vol.39 (11), p.2459-2464
Hauptverfasser: Reynolds, C.L., Vuong, H.H.T., Peticolas, L.J.
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 2464
container_issue 11
container_start_page 2459
container_title IEEE transactions on electron devices
container_volume 39
creator Reynolds, C.L.
Vuong, H.H.T.
Peticolas, L.J.
description The influence of C and Si impurities at the substrate/epitaxy interface on the threshold voltage of GaAs/AlGaAs selectively doped heterostructure transistors has been investigated both experimentally and theoretically using a one-dimensional simulation. The presence of C raises the conduction band relative to the Fermi level and reduces the electron density in the channel. This results in a positive shift of the depletion-mode (DFET) threshold voltage as the interfacial C concentration increases. For low C concentrations the DFET threshold voltage decreases with increasing Si at the interface. The impact of interfacial C and Si is small on the enhancement-mode (EFET) threshold voltage.< >
doi_str_mv 10.1109/16.163458
format Article
fullrecord <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_proquest_miscellaneous_28802196</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>163458</ieee_id><sourcerecordid>28966347</sourcerecordid><originalsourceid>FETCH-LOGICAL-c434t-59a986cdcdbcb6daf9a98125c5b67913da7ac66baddc591f18e1fe3c1692356f3</originalsourceid><addsrcrecordid>eNqNkD1PwzAQQC0EEqUwsDJlQEgMKbnYucQjqvgoqsQCc-Q4Z2GUj2I7A_8eV0Gwdjrd6d0bHmOXkK0AMnkHuALkoqiO2AKKokwlCjxmiyyDKpW84qfszPvPuKIQ-YK9bPqd0iEZTWKHQM4oTYntd5OzwZJPxiH5oHgffXCTDpOjxFjq2pSMofgXnBq89WF0_pydGNV5uvidS_b--PC2fk63r0-b9f021YKLkBZSyQp1q9tGN9gqs98hL3TRYCmBt6pUGrFRbasLCQYqAkNcA8qcF2j4kt3M3p0bvybyoe6t19R1aqBx8nVeSYwJygPAKstB4gGgiGApI3g7gzoG8Y5MvXO2V-67hqze968B67l_ZK9_pcpr1ZkYSlv_9yCEFDnulVczZonoXzc7fgDLN43h</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>28402179</pqid></control><display><type>article</type><title>Impact of interface impurities on heterostructure field-effect transistors</title><source>IEEE/IET Electronic Library</source><creator>Reynolds, C.L. ; Vuong, H.H.T. ; Peticolas, L.J.</creator><creatorcontrib>Reynolds, C.L. ; Vuong, H.H.T. ; Peticolas, L.J.</creatorcontrib><description>The influence of C and Si impurities at the substrate/epitaxy interface on the threshold voltage of GaAs/AlGaAs selectively doped heterostructure transistors has been investigated both experimentally and theoretically using a one-dimensional simulation. The presence of C raises the conduction band relative to the Fermi level and reduces the electron density in the channel. This results in a positive shift of the depletion-mode (DFET) threshold voltage as the interfacial C concentration increases. For low C concentrations the DFET threshold voltage decreases with increasing Si at the interface. The impact of interfacial C and Si is small on the enhancement-mode (EFET) threshold voltage.&lt; &gt;</description><identifier>ISSN: 0018-9383</identifier><identifier>EISSN: 1557-9646</identifier><identifier>DOI: 10.1109/16.163458</identifier><identifier>CODEN: IETDAI</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Applied sciences ; Contamination ; Electronics ; Epitaxial growth ; Exact sciences and technology ; FETs ; Gallium arsenide ; HEMTs ; Impurities ; MODFETs ; Molecular beam epitaxial growth ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; Substrates ; Threshold voltage ; Transistors</subject><ispartof>IEEE transactions on electron devices, 1992-11, Vol.39 (11), p.2459-2464</ispartof><rights>1993 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c434t-59a986cdcdbcb6daf9a98125c5b67913da7ac66baddc591f18e1fe3c1692356f3</citedby><cites>FETCH-LOGICAL-c434t-59a986cdcdbcb6daf9a98125c5b67913da7ac66baddc591f18e1fe3c1692356f3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/163458$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,777,781,793,27905,27906,54739</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/163458$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=4494269$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Reynolds, C.L.</creatorcontrib><creatorcontrib>Vuong, H.H.T.</creatorcontrib><creatorcontrib>Peticolas, L.J.</creatorcontrib><title>Impact of interface impurities on heterostructure field-effect transistors</title><title>IEEE transactions on electron devices</title><addtitle>TED</addtitle><description>The influence of C and Si impurities at the substrate/epitaxy interface on the threshold voltage of GaAs/AlGaAs selectively doped heterostructure transistors has been investigated both experimentally and theoretically using a one-dimensional simulation. The presence of C raises the conduction band relative to the Fermi level and reduces the electron density in the channel. This results in a positive shift of the depletion-mode (DFET) threshold voltage as the interfacial C concentration increases. For low C concentrations the DFET threshold voltage decreases with increasing Si at the interface. The impact of interfacial C and Si is small on the enhancement-mode (EFET) threshold voltage.&lt; &gt;</description><subject>Applied sciences</subject><subject>Contamination</subject><subject>Electronics</subject><subject>Epitaxial growth</subject><subject>Exact sciences and technology</subject><subject>FETs</subject><subject>Gallium arsenide</subject><subject>HEMTs</subject><subject>Impurities</subject><subject>MODFETs</subject><subject>Molecular beam epitaxial growth</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>Substrates</subject><subject>Threshold voltage</subject><subject>Transistors</subject><issn>0018-9383</issn><issn>1557-9646</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1992</creationdate><recordtype>article</recordtype><recordid>eNqNkD1PwzAQQC0EEqUwsDJlQEgMKbnYucQjqvgoqsQCc-Q4Z2GUj2I7A_8eV0Gwdjrd6d0bHmOXkK0AMnkHuALkoqiO2AKKokwlCjxmiyyDKpW84qfszPvPuKIQ-YK9bPqd0iEZTWKHQM4oTYntd5OzwZJPxiH5oHgffXCTDpOjxFjq2pSMofgXnBq89WF0_pydGNV5uvidS_b--PC2fk63r0-b9f021YKLkBZSyQp1q9tGN9gqs98hL3TRYCmBt6pUGrFRbasLCQYqAkNcA8qcF2j4kt3M3p0bvybyoe6t19R1aqBx8nVeSYwJygPAKstB4gGgiGApI3g7gzoG8Y5MvXO2V-67hqze968B67l_ZK9_pcpr1ZkYSlv_9yCEFDnulVczZonoXzc7fgDLN43h</recordid><startdate>19921101</startdate><enddate>19921101</enddate><creator>Reynolds, C.L.</creator><creator>Vuong, H.H.T.</creator><creator>Peticolas, L.J.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope><scope>7QF</scope><scope>8BQ</scope><scope>JG9</scope><scope>7U5</scope></search><sort><creationdate>19921101</creationdate><title>Impact of interface impurities on heterostructure field-effect transistors</title><author>Reynolds, C.L. ; Vuong, H.H.T. ; Peticolas, L.J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c434t-59a986cdcdbcb6daf9a98125c5b67913da7ac66baddc591f18e1fe3c1692356f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1992</creationdate><topic>Applied sciences</topic><topic>Contamination</topic><topic>Electronics</topic><topic>Epitaxial growth</topic><topic>Exact sciences and technology</topic><topic>FETs</topic><topic>Gallium arsenide</topic><topic>HEMTs</topic><topic>Impurities</topic><topic>MODFETs</topic><topic>Molecular beam epitaxial growth</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>Substrates</topic><topic>Threshold voltage</topic><topic>Transistors</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Reynolds, C.L.</creatorcontrib><creatorcontrib>Vuong, H.H.T.</creatorcontrib><creatorcontrib>Peticolas, L.J.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Aluminium Industry Abstracts</collection><collection>METADEX</collection><collection>Materials Research Database</collection><collection>Solid State and Superconductivity Abstracts</collection><jtitle>IEEE transactions on electron devices</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Reynolds, C.L.</au><au>Vuong, H.H.T.</au><au>Peticolas, L.J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Impact of interface impurities on heterostructure field-effect transistors</atitle><jtitle>IEEE transactions on electron devices</jtitle><stitle>TED</stitle><date>1992-11-01</date><risdate>1992</risdate><volume>39</volume><issue>11</issue><spage>2459</spage><epage>2464</epage><pages>2459-2464</pages><issn>0018-9383</issn><eissn>1557-9646</eissn><coden>IETDAI</coden><abstract>The influence of C and Si impurities at the substrate/epitaxy interface on the threshold voltage of GaAs/AlGaAs selectively doped heterostructure transistors has been investigated both experimentally and theoretically using a one-dimensional simulation. The presence of C raises the conduction band relative to the Fermi level and reduces the electron density in the channel. This results in a positive shift of the depletion-mode (DFET) threshold voltage as the interfacial C concentration increases. For low C concentrations the DFET threshold voltage decreases with increasing Si at the interface. The impact of interfacial C and Si is small on the enhancement-mode (EFET) threshold voltage.&lt; &gt;</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/16.163458</doi><tpages>6</tpages></addata></record>
fulltext fulltext_linktorsrc
identifier ISSN: 0018-9383
ispartof IEEE transactions on electron devices, 1992-11, Vol.39 (11), p.2459-2464
issn 0018-9383
1557-9646
language eng
recordid cdi_proquest_miscellaneous_28802196
source IEEE/IET Electronic Library
subjects Applied sciences
Contamination
Electronics
Epitaxial growth
Exact sciences and technology
FETs
Gallium arsenide
HEMTs
Impurities
MODFETs
Molecular beam epitaxial growth
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Substrates
Threshold voltage
Transistors
title Impact of interface impurities on heterostructure field-effect transistors
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-17T13%3A55%3A41IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Impact%20of%20interface%20impurities%20on%20heterostructure%20field-effect%20transistors&rft.jtitle=IEEE%20transactions%20on%20electron%20devices&rft.au=Reynolds,%20C.L.&rft.date=1992-11-01&rft.volume=39&rft.issue=11&rft.spage=2459&rft.epage=2464&rft.pages=2459-2464&rft.issn=0018-9383&rft.eissn=1557-9646&rft.coden=IETDAI&rft_id=info:doi/10.1109/16.163458&rft_dat=%3Cproquest_RIE%3E28966347%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=28402179&rft_id=info:pmid/&rft_ieee_id=163458&rfr_iscdi=true