Simulation of characteristics of a SiO(2)/c-axis-oriented LiNbO(3)/diamond surface acoustic wave

High-frequency surface acoustic wave (SAW) devices based on diamond that have been realized to date utilize c-axis-oriented ZnO as the piezoelectric thin film. This material, with SiO(2) overlay, shows excellent characteristics of a high phase velocity of over 10,000 m/s and a zero temperature coeff...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2004-12, Vol.51 (12), p.1683-1689
Hauptverfasser:	Shikata, S, Hachigo, A, Nakahata, H
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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