Simulation of characteristics of a SiO(2)/c-axis-oriented LiNbO(3)/diamond surface acoustic wave

Simulation of characteristics of a SiO(2)/c-axis-oriented LiNbO(3)/diamond surface acoustic wave

High-frequency surface acoustic wave (SAW) devices based on diamond that have been realized to date utilize c-axis-oriented ZnO as the piezoelectric thin film. This material, with SiO(2) overlay, shows excellent characteristics of a high phase velocity of over 10,000 m/s and a zero temperature coeff...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2004-12, Vol.51 (12), p.1683-1689
Hauptverfasser: Shikata, S, Hachigo, A, Nakahata, H
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container_title IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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creator Shikata, S
Hachigo, A
Nakahata, H
description High-frequency surface acoustic wave (SAW) devices based on diamond that have been realized to date utilize c-axis-oriented ZnO as the piezoelectric thin film. This material, with SiO(2) overlay, shows excellent characteristics of a high phase velocity of over 10,000 m/s and a zero temperature coefficient, and it has been successfully applied to high-frequency SAW filters and resonators. To expand on materials used on diamond, the theoretical calculation has been carried out for LiNbO(3)/diamond, and a high electromechanical coupling coefficient up to 9.0% is expected. In this work, the characteristics of SiO(2)/LiNbO(3)/diamond were studied by computer simulation, emphasizing a zero temperature coefficient with a high coupling coefficient. Calculations are carried out for the phase velocity, the electromechanical coupling coefficient, and the temperature coefficient of the Rayleigh wave and its higher mode Sezawa wave. As a result, SiO(2)/IDT/LiNbO(3)/diamond is found to offer a zero temperature coefficient with a very high coupling coefficient up to 10.1% in conjunction with a high phase velocity of 12,100 m/s.
doi_str_mv 10.1109/TUFFC.2004.1386685
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