Effect of micro-gap electrode on sensing properties to dilute chlorine gas of indium oxide thin film microsensors

Effects of gap size on dilute Cl2 gas sensing properties have been investigated for the In2O3 thin film microsensors equipped with micro-gap electrode. The micro-gap electrodes with various gap sizes (0.1–2μm) were fabricated on SiO2/Si substrate by means of MEMS techniques (photolithography and FIB...

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Veröffentlicht in:	Sensors and actuators. B, Chemical Chemical, 2006-10, Vol.117 (2), p.353-358
Hauptverfasser:	Tamaki, Jun, Niimi, Jun, Ogura, Shunsuke, Konishi, Satoshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Calcines Cl2 gas sensing Dilution Electrodes Gas sensors Grains In2O3 Indium oxides MEMS Micro gas sensor Micro-gap Sensors Thin films
Online-Zugang:	Volltext
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