Metalloorganic solution deposition of ferroelectric PZT films

The metallo-organic solution deposition (MOSD or sol-gel) technique can be used for preparing lead zirconate titanate (PZT) ceramics with a wide range of compositions and crystal structures for electrooptical applications. Film morphology is affected by the stoichiometry of the film, hydrolysis and...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 1991-11, Vol.38 (6), p.684-689
Hauptverfasser:	Lipeles, R.A., Coleman, D.J., Leung, M.S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Ceramics Coatings Condensed matter: structure, mechanical and thermal properties Crystalline materials Exact sciences and technology Ferroelectric films Ferroelectric materials Lattices Morphology Optical films Physics Polymer films Solid surfaces and solid-solid interfaces Surface and interface dynamics and vibrations Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Titanium compounds
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