Modeling interdigital electrode structures for the dielectric characterization of electroceramic thin films
A combination of physical and numerical modeling has been used to investigate the use of co-planar interdigital electrode (IDE) structures to characterize the dielectric properties of isotropic electroceramic thin films. A periodic two-dimensional IDE structure was simulated by finite-difference num...
Gespeichert in:
| Veröffentlicht in: | Thin solid films 2006-02, Vol.496 (2), p.539-545 |
|---|---|
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 545 |
|---|---|
| container_issue | 2 |
| container_start_page | 539 |
| container_title | Thin solid films |
| container_volume | 496 |
| creator | Kidner, N.J. Homrighaus, Z.J. Mason, T.O. Garboczi, E.J. |
| description | A combination of physical and numerical modeling has been used to investigate the use of co-planar interdigital electrode (IDE) structures to characterize the dielectric properties of isotropic electroceramic thin films. A periodic two-dimensional IDE structure was simulated by finite-difference numerical modeling to investigate different electrode geometries and film thicknesses. A semi-empirical equation that enables the dielectric properties of the thin film to be calculated from the measured capacitance has been developed and is shown to be consistent with conformal mapping approaches. This equation is shown to agree better with various calculations over a wider range of parameters than the existing equation of Farnell (IEEE Trans. Son. Ultrson., SU-17(3) (1970) 188). Physical simulations of IDE structures with a limited number of electrode fingers have enabled the approach to be generalized to any IDE structure including the important special case of a two-electrode strip-line. |
| doi_str_mv | 10.1016/j.tsf.2005.08.350 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_28707869</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0040609005015658</els_id><sourcerecordid>28707869</sourcerecordid><originalsourceid>FETCH-LOGICAL-c358t-84ccc2663bac7864b8a2b093d84f6e3349701c0866a04553f42b1b650d0178313</originalsourceid><addsrcrecordid>eNp9kMFu1DAQhi0EEkvhAbj5Qm9Jx3ZiO-KEqhYqteqlnC1nYndnySbF9laCp8fVFvXW0xzm-__RfIx9FtAKEPps15YcWwnQt2Bb1cMbthHWDI00SrxlG4AOGg0DvGcfct4BgJBSbdivm3UKMy33nJYS0kT3VPzMwxywpLriuaQDlkMKmcc18bINfKLjmpDj1iePNUh_faF14Wv8n8WQ_L4iZUsLjzTv80f2Lvo5h0_P84T9vLy4O__RXN9-vzr_dt2g6m1pbIeIUms1ejRWd6P1coRBTbaLOijVDQYEgtXaQ9f3KnZyFKPuYQJhrBLqhJ0eex_S-vsQcnF7yhjm2S9hPWQnrYFaPFRQHEFMa84pRPeQaO_THyfAPWl1O1e1uietDqyrWmvmy3O5z-jnmPyClF-CpjNGgqrc1yMX6qePFJLLSGHBMFGqfty00itX_gF1oY6z</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>28707869</pqid></control><display><type>article</type><title>Modeling interdigital electrode structures for the dielectric characterization of electroceramic thin films</title><source>Elsevier ScienceDirect Journals</source><creator>Kidner, N.J. ; Homrighaus, Z.J. ; Mason, T.O. ; Garboczi, E.J.</creator><creatorcontrib>Kidner, N.J. ; Homrighaus, Z.J. ; Mason, T.O. ; Garboczi, E.J.</creatorcontrib><description>A combination of physical and numerical modeling has been used to investigate the use of co-planar interdigital electrode (IDE) structures to characterize the dielectric properties of isotropic electroceramic thin films. A periodic two-dimensional IDE structure was simulated by finite-difference numerical modeling to investigate different electrode geometries and film thicknesses. A semi-empirical equation that enables the dielectric properties of the thin film to be calculated from the measured capacitance has been developed and is shown to be consistent with conformal mapping approaches. This equation is shown to agree better with various calculations over a wider range of parameters than the existing equation of Farnell (IEEE Trans. Son. Ultrson., SU-17(3) (1970) 188). Physical simulations of IDE structures with a limited number of electrode fingers have enabled the approach to be generalized to any IDE structure including the important special case of a two-electrode strip-line.</description><identifier>ISSN: 0040-6090</identifier><identifier>EISSN: 1879-2731</identifier><identifier>DOI: 10.1016/j.tsf.2005.08.350</identifier><identifier>CODEN: THSFAP</identifier><language>eng</language><publisher>Lausanne: Elsevier B.V</publisher><subject>Chemistry ; Conformal mapping ; Dielectric ; Electrochemistry ; Electrodes: preparations and properties ; Exact sciences and technology ; Farnell ; General and physical chemistry ; Interdigitial electrodes</subject><ispartof>Thin solid films, 2006-02, Vol.496 (2), p.539-545</ispartof><rights>2005 Elsevier B.V.</rights><rights>2006 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c358t-84ccc2663bac7864b8a2b093d84f6e3349701c0866a04553f42b1b650d0178313</citedby><cites>FETCH-LOGICAL-c358t-84ccc2663bac7864b8a2b093d84f6e3349701c0866a04553f42b1b650d0178313</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S0040609005015658$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,776,780,3537,27901,27902,65306</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=17477203$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Kidner, N.J.</creatorcontrib><creatorcontrib>Homrighaus, Z.J.</creatorcontrib><creatorcontrib>Mason, T.O.</creatorcontrib><creatorcontrib>Garboczi, E.J.</creatorcontrib><title>Modeling interdigital electrode structures for the dielectric characterization of electroceramic thin films</title><title>Thin solid films</title><description>A combination of physical and numerical modeling has been used to investigate the use of co-planar interdigital electrode (IDE) structures to characterize the dielectric properties of isotropic electroceramic thin films. A periodic two-dimensional IDE structure was simulated by finite-difference numerical modeling to investigate different electrode geometries and film thicknesses. A semi-empirical equation that enables the dielectric properties of the thin film to be calculated from the measured capacitance has been developed and is shown to be consistent with conformal mapping approaches. This equation is shown to agree better with various calculations over a wider range of parameters than the existing equation of Farnell (IEEE Trans. Son. Ultrson., SU-17(3) (1970) 188). Physical simulations of IDE structures with a limited number of electrode fingers have enabled the approach to be generalized to any IDE structure including the important special case of a two-electrode strip-line.</description><subject>Chemistry</subject><subject>Conformal mapping</subject><subject>Dielectric</subject><subject>Electrochemistry</subject><subject>Electrodes: preparations and properties</subject><subject>Exact sciences and technology</subject><subject>Farnell</subject><subject>General and physical chemistry</subject><subject>Interdigitial electrodes</subject><issn>0040-6090</issn><issn>1879-2731</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNp9kMFu1DAQhi0EEkvhAbj5Qm9Jx3ZiO-KEqhYqteqlnC1nYndnySbF9laCp8fVFvXW0xzm-__RfIx9FtAKEPps15YcWwnQt2Bb1cMbthHWDI00SrxlG4AOGg0DvGcfct4BgJBSbdivm3UKMy33nJYS0kT3VPzMwxywpLriuaQDlkMKmcc18bINfKLjmpDj1iePNUh_faF14Wv8n8WQ_L4iZUsLjzTv80f2Lvo5h0_P84T9vLy4O__RXN9-vzr_dt2g6m1pbIeIUms1ejRWd6P1coRBTbaLOijVDQYEgtXaQ9f3KnZyFKPuYQJhrBLqhJ0eex_S-vsQcnF7yhjm2S9hPWQnrYFaPFRQHEFMa84pRPeQaO_THyfAPWl1O1e1uietDqyrWmvmy3O5z-jnmPyClF-CpjNGgqrc1yMX6qePFJLLSGHBMFGqfty00itX_gF1oY6z</recordid><startdate>20060221</startdate><enddate>20060221</enddate><creator>Kidner, N.J.</creator><creator>Homrighaus, Z.J.</creator><creator>Mason, T.O.</creator><creator>Garboczi, E.J.</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>7SR</scope><scope>7U5</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20060221</creationdate><title>Modeling interdigital electrode structures for the dielectric characterization of electroceramic thin films</title><author>Kidner, N.J. ; Homrighaus, Z.J. ; Mason, T.O. ; Garboczi, E.J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c358t-84ccc2663bac7864b8a2b093d84f6e3349701c0866a04553f42b1b650d0178313</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Chemistry</topic><topic>Conformal mapping</topic><topic>Dielectric</topic><topic>Electrochemistry</topic><topic>Electrodes: preparations and properties</topic><topic>Exact sciences and technology</topic><topic>Farnell</topic><topic>General and physical chemistry</topic><topic>Interdigitial electrodes</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kidner, N.J.</creatorcontrib><creatorcontrib>Homrighaus, Z.J.</creatorcontrib><creatorcontrib>Mason, T.O.</creatorcontrib><creatorcontrib>Garboczi, E.J.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Thin solid films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kidner, N.J.</au><au>Homrighaus, Z.J.</au><au>Mason, T.O.</au><au>Garboczi, E.J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Modeling interdigital electrode structures for the dielectric characterization of electroceramic thin films</atitle><jtitle>Thin solid films</jtitle><date>2006-02-21</date><risdate>2006</risdate><volume>496</volume><issue>2</issue><spage>539</spage><epage>545</epage><pages>539-545</pages><issn>0040-6090</issn><eissn>1879-2731</eissn><coden>THSFAP</coden><abstract>A combination of physical and numerical modeling has been used to investigate the use of co-planar interdigital electrode (IDE) structures to characterize the dielectric properties of isotropic electroceramic thin films. A periodic two-dimensional IDE structure was simulated by finite-difference numerical modeling to investigate different electrode geometries and film thicknesses. A semi-empirical equation that enables the dielectric properties of the thin film to be calculated from the measured capacitance has been developed and is shown to be consistent with conformal mapping approaches. This equation is shown to agree better with various calculations over a wider range of parameters than the existing equation of Farnell (IEEE Trans. Son. Ultrson., SU-17(3) (1970) 188). Physical simulations of IDE structures with a limited number of electrode fingers have enabled the approach to be generalized to any IDE structure including the important special case of a two-electrode strip-line.</abstract><cop>Lausanne</cop><pub>Elsevier B.V</pub><doi>10.1016/j.tsf.2005.08.350</doi><tpages>7</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0040-6090 |
| ispartof | Thin solid films, 2006-02, Vol.496 (2), p.539-545 |
| issn | 0040-6090 1879-2731 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_28707869 |
| source | Elsevier ScienceDirect Journals |
| subjects | Chemistry Conformal mapping Dielectric Electrochemistry Electrodes: preparations and properties Exact sciences and technology Farnell General and physical chemistry Interdigitial electrodes |
| title | Modeling interdigital electrode structures for the dielectric characterization of electroceramic thin films |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-12T23%3A56%3A58IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Modeling%20interdigital%20electrode%20structures%20for%20the%20dielectric%20characterization%20of%20electroceramic%20thin%20films&rft.jtitle=Thin%20solid%20films&rft.au=Kidner,%20N.J.&rft.date=2006-02-21&rft.volume=496&rft.issue=2&rft.spage=539&rft.epage=545&rft.pages=539-545&rft.issn=0040-6090&rft.eissn=1879-2731&rft.coden=THSFAP&rft_id=info:doi/10.1016/j.tsf.2005.08.350&rft_dat=%3Cproquest_cross%3E28707869%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=28707869&rft_id=info:pmid/&rft_els_id=S0040609005015658&rfr_iscdi=true |