Syntheses and mechanical properties of Ti–B–C coatings by a plasma-enhanced chemical vapor deposition
Ti–B–C coatings were synthesized on WC–Co and Si wafer substrates by PECVD technique using a gaseous mixture of TiCl 4, BCl 3, CH 4, Ar, and H 2. In this work, the boron content was varied in a wide range from TiC to TiB 2, and microstructure and mechanical properties of synthesized Ti–B–C coatings...
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| Veröffentlicht in: | Surface & coatings technology 2005-11, Vol.200 (5), p.1418-1423 |
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| creator | Ok, Jung-Tae Park, In-Wook Moore, John J. Kang, Myung Chang Kim, Kwang Ho |
| description | Ti–B–C coatings were synthesized on WC–Co and Si wafer substrates by PECVD technique using a gaseous mixture of TiCl
4, BCl
3, CH
4, Ar, and H
2. In this work, the boron content was varied in a wide range from TiC to TiB
2, and microstructure and mechanical properties of synthesized Ti–B–C coatings were systematically investigated. From our instrumental analyses, the synthesized Ti–B–C coatings was concluded to be composites consisting of nanocrystallites TiC, quasi-amorphous TiB
2, and amorphous carbon at low boron content, on the contrary, nanocrystallites TiB
2, quasi-amorphous TiC, and amorphous carbon at relatively high boron content. The microhardness of the Ti–B–C coatings increased from ∼
23 GPa of TiC to ∼
38 GPa of Ti
0.33B
0.55C
0.11 coatings with increasing the boron content. The Ti
0.33B
0.55C
0.11 coatings showed lower average friction coefficient of 0.45, in addition, it showed relatively better wear behavior compared to other binary coatings of TiB
2 and TiC. |
| doi_str_mv | 10.1016/j.surfcoat.2005.08.078 |
| format | Article |
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4, BCl
3, CH
4, Ar, and H
2. In this work, the boron content was varied in a wide range from TiC to TiB
2, and microstructure and mechanical properties of synthesized Ti–B–C coatings were systematically investigated. From our instrumental analyses, the synthesized Ti–B–C coatings was concluded to be composites consisting of nanocrystallites TiC, quasi-amorphous TiB
2, and amorphous carbon at low boron content, on the contrary, nanocrystallites TiB
2, quasi-amorphous TiC, and amorphous carbon at relatively high boron content. The microhardness of the Ti–B–C coatings increased from ∼
23 GPa of TiC to ∼
38 GPa of Ti
0.33B
0.55C
0.11 coatings with increasing the boron content. The Ti
0.33B
0.55C
0.11 coatings showed lower average friction coefficient of 0.45, in addition, it showed relatively better wear behavior compared to other binary coatings of TiB
2 and TiC.</description><identifier>ISSN: 0257-8972</identifier><identifier>EISSN: 1879-3347</identifier><identifier>DOI: 10.1016/j.surfcoat.2005.08.078</identifier><identifier>CODEN: SCTEEJ</identifier><language>eng</language><publisher>Lausanne: Elsevier B.V</publisher><subject>Applied sciences ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; Friction coefficient ; Materials science ; Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology ; Metals. Metallurgy ; Microhardness ; Other topics in materials science ; PECVD ; Physics ; Production techniques ; Surface treatment ; Ti–B–C coatings</subject><ispartof>Surface & coatings technology, 2005-11, Vol.200 (5), p.1418-1423</ispartof><rights>2005 Elsevier B.V.</rights><rights>2006 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c439t-24c54486325fcd2bacf02a4aaef6900d8251758e81233011d27c62694b3d7da73</citedby><cites>FETCH-LOGICAL-c439t-24c54486325fcd2bacf02a4aaef6900d8251758e81233011d27c62694b3d7da73</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.surfcoat.2005.08.078$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>309,310,314,776,780,785,786,3536,23910,23911,25119,27903,27904,45974</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=17494223$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Ok, Jung-Tae</creatorcontrib><creatorcontrib>Park, In-Wook</creatorcontrib><creatorcontrib>Moore, John J.</creatorcontrib><creatorcontrib>Kang, Myung Chang</creatorcontrib><creatorcontrib>Kim, Kwang Ho</creatorcontrib><title>Syntheses and mechanical properties of Ti–B–C coatings by a plasma-enhanced chemical vapor deposition</title><title>Surface & coatings technology</title><description>Ti–B–C coatings were synthesized on WC–Co and Si wafer substrates by PECVD technique using a gaseous mixture of TiCl
4, BCl
3, CH
4, Ar, and H
2. In this work, the boron content was varied in a wide range from TiC to TiB
2, and microstructure and mechanical properties of synthesized Ti–B–C coatings were systematically investigated. From our instrumental analyses, the synthesized Ti–B–C coatings was concluded to be composites consisting of nanocrystallites TiC, quasi-amorphous TiB
2, and amorphous carbon at low boron content, on the contrary, nanocrystallites TiB
2, quasi-amorphous TiC, and amorphous carbon at relatively high boron content. The microhardness of the Ti–B–C coatings increased from ∼
23 GPa of TiC to ∼
38 GPa of Ti
0.33B
0.55C
0.11 coatings with increasing the boron content. The Ti
0.33B
0.55C
0.11 coatings showed lower average friction coefficient of 0.45, in addition, it showed relatively better wear behavior compared to other binary coatings of TiB
2 and TiC.</description><subject>Applied sciences</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Friction coefficient</subject><subject>Materials science</subject><subject>Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology</subject><subject>Metals. Metallurgy</subject><subject>Microhardness</subject><subject>Other topics in materials science</subject><subject>PECVD</subject><subject>Physics</subject><subject>Production techniques</subject><subject>Surface treatment</subject><subject>Ti–B–C coatings</subject><issn>0257-8972</issn><issn>1879-3347</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNqFkM2u0zAQhS0EEqXwCsgb2CWMHSd2dkDFn3QlFlzW1tSeUFdJHOz0St3xDrwhT4JLL2LJwpqFz5kz52PsuYBagOheHet8SoOLuNYSoK3B1KDNA7YRRvdV0yj9kG1AtroyvZaP2ZOcjwAgdK82LHw5z-uBMmWOs-cTuQPOweHIlxQXSmsoP3Hgt-HXj59vy9vxS1KYv2W-P3Pky4h5worm4nPkuTvQ9Md_h0tM3NMSc1hDnJ-yRwOOmZ7dzy37-v7d7e5jdfP5w6fdm5vKqaZfK6lcq5TpGtkOzss9ugEkKkQauh7AG9kK3RoyQjYNCOGldp3serVvvPaomy17ed1bCnw_UV7tFLKjccSZ4ilbaXQpD6oIu6vQpZhzosEuKUyYzlaAvZC1R_uXrL2QtWBsIVuML-4TMJemQyrNQ_7n1qpXsly3Za-vOip17wIlm12gC6WQyK3Wx_C_qN8fIpU-</recordid><startdate>20051121</startdate><enddate>20051121</enddate><creator>Ok, Jung-Tae</creator><creator>Park, In-Wook</creator><creator>Moore, John J.</creator><creator>Kang, Myung Chang</creator><creator>Kim, Kwang Ho</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20051121</creationdate><title>Syntheses and mechanical properties of Ti–B–C coatings by a plasma-enhanced chemical vapor deposition</title><author>Ok, Jung-Tae ; Park, In-Wook ; Moore, John J. ; Kang, Myung Chang ; Kim, Kwang Ho</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c439t-24c54486325fcd2bacf02a4aaef6900d8251758e81233011d27c62694b3d7da73</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Applied sciences</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Exact sciences and technology</topic><topic>Friction coefficient</topic><topic>Materials science</topic><topic>Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology</topic><topic>Metals. Metallurgy</topic><topic>Microhardness</topic><topic>Other topics in materials science</topic><topic>PECVD</topic><topic>Physics</topic><topic>Production techniques</topic><topic>Surface treatment</topic><topic>Ti–B–C coatings</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ok, Jung-Tae</creatorcontrib><creatorcontrib>Park, In-Wook</creatorcontrib><creatorcontrib>Moore, John J.</creatorcontrib><creatorcontrib>Kang, Myung Chang</creatorcontrib><creatorcontrib>Kim, Kwang Ho</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Surface & coatings technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ok, Jung-Tae</au><au>Park, In-Wook</au><au>Moore, John J.</au><au>Kang, Myung Chang</au><au>Kim, Kwang Ho</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Syntheses and mechanical properties of Ti–B–C coatings by a plasma-enhanced chemical vapor deposition</atitle><jtitle>Surface & coatings technology</jtitle><date>2005-11-21</date><risdate>2005</risdate><volume>200</volume><issue>5</issue><spage>1418</spage><epage>1423</epage><pages>1418-1423</pages><issn>0257-8972</issn><eissn>1879-3347</eissn><coden>SCTEEJ</coden><abstract>Ti–B–C coatings were synthesized on WC–Co and Si wafer substrates by PECVD technique using a gaseous mixture of TiCl
4, BCl
3, CH
4, Ar, and H
2. In this work, the boron content was varied in a wide range from TiC to TiB
2, and microstructure and mechanical properties of synthesized Ti–B–C coatings were systematically investigated. From our instrumental analyses, the synthesized Ti–B–C coatings was concluded to be composites consisting of nanocrystallites TiC, quasi-amorphous TiB
2, and amorphous carbon at low boron content, on the contrary, nanocrystallites TiB
2, quasi-amorphous TiC, and amorphous carbon at relatively high boron content. The microhardness of the Ti–B–C coatings increased from ∼
23 GPa of TiC to ∼
38 GPa of Ti
0.33B
0.55C
0.11 coatings with increasing the boron content. The Ti
0.33B
0.55C
0.11 coatings showed lower average friction coefficient of 0.45, in addition, it showed relatively better wear behavior compared to other binary coatings of TiB
2 and TiC.</abstract><cop>Lausanne</cop><pub>Elsevier B.V</pub><doi>10.1016/j.surfcoat.2005.08.078</doi><tpages>6</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0257-8972 |
| ispartof | Surface & coatings technology, 2005-11, Vol.200 (5), p.1418-1423 |
| issn | 0257-8972 1879-3347 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_28700104 |
| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Applied sciences Cross-disciplinary physics: materials science rheology Exact sciences and technology Friction coefficient Materials science Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology Metals. Metallurgy Microhardness Other topics in materials science PECVD Physics Production techniques Surface treatment Ti–B–C coatings |
| title | Syntheses and mechanical properties of Ti–B–C coatings by a plasma-enhanced chemical vapor deposition |
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