Bonding characteristics of DC magnetron sputtered B–C–N thin films investigated by Fourier-transformed infrared spectroscopy and X-ray photoelectron spectroscopy

B–C–N thin films of a wide composition range were deposited by reactive DC magnetron sputtering of targets with different B/C ratios in an Ar/N 2 atmosphere. The bonding characteristics of these amorphous films were investigated by Fourier-transformed infrared spectroscopy (FTIR) and X-ray photoelec...

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Veröffentlicht in:	Thin solid films 2004-11, Vol.467 (1), p.76-87
Hauptverfasser:	Linss, V., Rodil, S.E., Reinke, P., Garnier, M.G., Oelhafen, P., Kreissig, U., Richter, F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Adsorbed layers and thin films BCN Bonding characteristics Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Electron and ion emission by liquids and solids impact phenomena Exact sciences and technology Fourier-transformed infrared spectroscopy (FTIR) Materials science Methods of deposition of films and coatings film growth and epitaxy Photoemission and photoelectron spectra Physics X-ray photoelectron spectroscopy (XPS)
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