The influence of the post-deposition treatment on some physical properties of Sb2S3 thin films
The influence of a thermal treatment for 30min from T=300K to T=473K, on the structural, electrical and optical properties of antimony trisulfide (Sb2S3) thin films has been investigated. The thin films deposited on a glass substrate by thermal vacuum evaporation at a substrate temperature TS=300K h...
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Veröffentlicht in: | Journal of non-crystalline solids 2005-05, Vol.351 (12-13), p.987-992 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | The influence of a thermal treatment for 30min from T=300K to T=473K, on the structural, electrical and optical properties of antimony trisulfide (Sb2S3) thin films has been investigated. The thin films deposited on a glass substrate by thermal vacuum evaporation at a substrate temperature TS=300K have amorphous structure, but after annealing they change to a polycrystalline structure, while those deposited at TS=498K have polycrystalline structure both before and after the heat-treatment. The structural modifications have a strong influence on the electrical and optical properties of the Sb2S3 thin films. |
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ISSN: | 0022-3093 1873-4812 |
DOI: | 10.1016/j.jnoncrysol.2004.12.014 |