The influence of the post-deposition treatment on some physical properties of Sb2S3 thin films

The influence of a thermal treatment for 30min from T=300K to T=473K, on the structural, electrical and optical properties of antimony trisulfide (Sb2S3) thin films has been investigated. The thin films deposited on a glass substrate by thermal vacuum evaporation at a substrate temperature TS=300K h...

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Veröffentlicht in:Journal of non-crystalline solids 2005-05, Vol.351 (12-13), p.987-992
Hauptverfasser: Ţigaˇu, N., Gheorghieş, C., Rusu, G.I., Condurache-Bota, S.
Format: Artikel
Sprache:eng
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Zusammenfassung:The influence of a thermal treatment for 30min from T=300K to T=473K, on the structural, electrical and optical properties of antimony trisulfide (Sb2S3) thin films has been investigated. The thin films deposited on a glass substrate by thermal vacuum evaporation at a substrate temperature TS=300K have amorphous structure, but after annealing they change to a polycrystalline structure, while those deposited at TS=498K have polycrystalline structure both before and after the heat-treatment. The structural modifications have a strong influence on the electrical and optical properties of the Sb2S3 thin films.
ISSN:0022-3093
1873-4812
DOI:10.1016/j.jnoncrysol.2004.12.014