Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films
The internal stress of sputtered titanium thin films was optimized for Micro Electro Mechanical System (MEMS) applications and the strength properties of the films were investigated. Low internal stress was obtained for 0.5-μm thick films by controlling the argon gas flow rate and for 1.0-μm thick f...
Gespeichert in:
| Veröffentlicht in: | Thin solid films 2005-07, Vol.484 (1), p.245-250 |
|---|---|
| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 250 |
|---|---|
| container_issue | 1 |
| container_start_page | 245 |
| container_title | Thin solid films |
| container_volume | 484 |
| creator | Tsuchiya, Toshiyuki Hirata, Masakazu Chiba, Norio |
| description | The internal stress of sputtered titanium thin films was optimized for Micro Electro Mechanical System (MEMS) applications and the strength properties of the films were investigated. Low internal stress was obtained for 0.5-μm thick films by controlling the argon gas flow rate and for 1.0-μm thick films using the multiple deposition process. The Young's modulus, tensile strength, and maximum elongation of the titanium films were measured using a thin film tensile tester with an electrostatic force grip system. The tested films were 0.5 or 1.0 μm thick, 20 or 50 μm wide, and 100 or 500 μm in gauge length. The averages of the Young's modulus and the tensile strength were 90 and 0.65–0.8 GPa, respectively. A large maximum strain was observed, showing slip along the maximum shear stress directions, which will enable more reliable MEMS devices. |
| doi_str_mv | 10.1016/j.tsf.2005.02.024 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_28661576</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0040609005002130</els_id><sourcerecordid>28661576</sourcerecordid><originalsourceid>FETCH-LOGICAL-c468t-4d2b062a48698e82e54e52cded2c274b0e82e321af6be4f5c97f009a77d1b3b93</originalsourceid><addsrcrecordid>eNp9UMGKFTEQDKLgc_UDvOWiXnaenUwmmcGTLLorLHhRxFPIZDq7ecxknunMgn9vnm_Bm1DQUF1VTRdjrwXsBQj9_rAvFPYSoNuDrFBP2E70ZmikacVTtgNQ0GgY4Dl7QXQAACFlu2M_fq5buntHfFmnbd7okofsfNkycirZxXTJXZp4wURx_sthuiv3fA2cjlspmLFuY3Epbgsv9zHxEOeFXrJnwc2Erx7nBfv--dO3q5vm9uv1l6uPt41Xui-NmuQIWjrV66HHXmKnsJN-wkl6adQIJ66VwgU9ogqdH0wAGJwxkxjbcWgv2Ntz7jGvvzakYpdIHufZJVw3srLXWnRGV6E4C31eiTIGe8xxcfm3FWBPFdqDrRXaU4UWZIWqnjeP4Y68m2szyUf6Z9R9TTem6j6cdVg_fYiYLfmIyeMUM_pipzX-58ofWY6HeA</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>28661576</pqid></control><display><type>article</type><title>Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films</title><source>Elsevier ScienceDirect Journals</source><creator>Tsuchiya, Toshiyuki ; Hirata, Masakazu ; Chiba, Norio</creator><creatorcontrib>Tsuchiya, Toshiyuki ; Hirata, Masakazu ; Chiba, Norio</creatorcontrib><description>The internal stress of sputtered titanium thin films was optimized for Micro Electro Mechanical System (MEMS) applications and the strength properties of the films were investigated. Low internal stress was obtained for 0.5-μm thick films by controlling the argon gas flow rate and for 1.0-μm thick films using the multiple deposition process. The Young's modulus, tensile strength, and maximum elongation of the titanium films were measured using a thin film tensile tester with an electrostatic force grip system. The tested films were 0.5 or 1.0 μm thick, 20 or 50 μm wide, and 100 or 500 μm in gauge length. The averages of the Young's modulus and the tensile strength were 90 and 0.65–0.8 GPa, respectively. A large maximum strain was observed, showing slip along the maximum shear stress directions, which will enable more reliable MEMS devices.</description><identifier>ISSN: 0040-6090</identifier><identifier>EISSN: 1879-2731</identifier><identifier>DOI: 10.1016/j.tsf.2005.02.024</identifier><identifier>CODEN: THSFAP</identifier><language>eng</language><publisher>Lausanne: Elsevier B.V</publisher><subject>Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Deposition by sputtering ; Elasticity, elastic constants ; Exact sciences and technology ; Fatigue, brittleness, fracture, and cracks ; Internal stress ; Materials science ; Mechanical and acoustical properties of condensed matter ; Mechanical properties ; Mechanical properties of solids ; Methods of deposition of films and coatings; film growth and epitaxy ; Physics ; Tensile test ; Titanium ; Young's modulus</subject><ispartof>Thin solid films, 2005-07, Vol.484 (1), p.245-250</ispartof><rights>2005 Elsevier B.V.</rights><rights>2005 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c468t-4d2b062a48698e82e54e52cded2c274b0e82e321af6be4f5c97f009a77d1b3b93</citedby><cites>FETCH-LOGICAL-c468t-4d2b062a48698e82e54e52cded2c274b0e82e321af6be4f5c97f009a77d1b3b93</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.tsf.2005.02.024$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,776,780,3536,27903,27904,45974</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=16886677$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Tsuchiya, Toshiyuki</creatorcontrib><creatorcontrib>Hirata, Masakazu</creatorcontrib><creatorcontrib>Chiba, Norio</creatorcontrib><title>Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films</title><title>Thin solid films</title><description>The internal stress of sputtered titanium thin films was optimized for Micro Electro Mechanical System (MEMS) applications and the strength properties of the films were investigated. Low internal stress was obtained for 0.5-μm thick films by controlling the argon gas flow rate and for 1.0-μm thick films using the multiple deposition process. The Young's modulus, tensile strength, and maximum elongation of the titanium films were measured using a thin film tensile tester with an electrostatic force grip system. The tested films were 0.5 or 1.0 μm thick, 20 or 50 μm wide, and 100 or 500 μm in gauge length. The averages of the Young's modulus and the tensile strength were 90 and 0.65–0.8 GPa, respectively. A large maximum strain was observed, showing slip along the maximum shear stress directions, which will enable more reliable MEMS devices.</description><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Deposition by sputtering</subject><subject>Elasticity, elastic constants</subject><subject>Exact sciences and technology</subject><subject>Fatigue, brittleness, fracture, and cracks</subject><subject>Internal stress</subject><subject>Materials science</subject><subject>Mechanical and acoustical properties of condensed matter</subject><subject>Mechanical properties</subject><subject>Mechanical properties of solids</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Physics</subject><subject>Tensile test</subject><subject>Titanium</subject><subject>Young's modulus</subject><issn>0040-6090</issn><issn>1879-2731</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNp9UMGKFTEQDKLgc_UDvOWiXnaenUwmmcGTLLorLHhRxFPIZDq7ecxknunMgn9vnm_Bm1DQUF1VTRdjrwXsBQj9_rAvFPYSoNuDrFBP2E70ZmikacVTtgNQ0GgY4Dl7QXQAACFlu2M_fq5buntHfFmnbd7okofsfNkycirZxXTJXZp4wURx_sthuiv3fA2cjlspmLFuY3Epbgsv9zHxEOeFXrJnwc2Erx7nBfv--dO3q5vm9uv1l6uPt41Xui-NmuQIWjrV66HHXmKnsJN-wkl6adQIJ66VwgU9ogqdH0wAGJwxkxjbcWgv2Ntz7jGvvzakYpdIHufZJVw3srLXWnRGV6E4C31eiTIGe8xxcfm3FWBPFdqDrRXaU4UWZIWqnjeP4Y68m2szyUf6Z9R9TTem6j6cdVg_fYiYLfmIyeMUM_pipzX-58ofWY6HeA</recordid><startdate>20050722</startdate><enddate>20050722</enddate><creator>Tsuchiya, Toshiyuki</creator><creator>Hirata, Masakazu</creator><creator>Chiba, Norio</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20050722</creationdate><title>Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films</title><author>Tsuchiya, Toshiyuki ; Hirata, Masakazu ; Chiba, Norio</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c468t-4d2b062a48698e82e54e52cded2c274b0e82e321af6be4f5c97f009a77d1b3b93</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Deposition by sputtering</topic><topic>Elasticity, elastic constants</topic><topic>Exact sciences and technology</topic><topic>Fatigue, brittleness, fracture, and cracks</topic><topic>Internal stress</topic><topic>Materials science</topic><topic>Mechanical and acoustical properties of condensed matter</topic><topic>Mechanical properties</topic><topic>Mechanical properties of solids</topic><topic>Methods of deposition of films and coatings; film growth and epitaxy</topic><topic>Physics</topic><topic>Tensile test</topic><topic>Titanium</topic><topic>Young's modulus</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Tsuchiya, Toshiyuki</creatorcontrib><creatorcontrib>Hirata, Masakazu</creatorcontrib><creatorcontrib>Chiba, Norio</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Thin solid films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Tsuchiya, Toshiyuki</au><au>Hirata, Masakazu</au><au>Chiba, Norio</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films</atitle><jtitle>Thin solid films</jtitle><date>2005-07-22</date><risdate>2005</risdate><volume>484</volume><issue>1</issue><spage>245</spage><epage>250</epage><pages>245-250</pages><issn>0040-6090</issn><eissn>1879-2731</eissn><coden>THSFAP</coden><abstract>The internal stress of sputtered titanium thin films was optimized for Micro Electro Mechanical System (MEMS) applications and the strength properties of the films were investigated. Low internal stress was obtained for 0.5-μm thick films by controlling the argon gas flow rate and for 1.0-μm thick films using the multiple deposition process. The Young's modulus, tensile strength, and maximum elongation of the titanium films were measured using a thin film tensile tester with an electrostatic force grip system. The tested films were 0.5 or 1.0 μm thick, 20 or 50 μm wide, and 100 or 500 μm in gauge length. The averages of the Young's modulus and the tensile strength were 90 and 0.65–0.8 GPa, respectively. A large maximum strain was observed, showing slip along the maximum shear stress directions, which will enable more reliable MEMS devices.</abstract><cop>Lausanne</cop><pub>Elsevier B.V</pub><doi>10.1016/j.tsf.2005.02.024</doi><tpages>6</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0040-6090 |
| ispartof | Thin solid films, 2005-07, Vol.484 (1), p.245-250 |
| issn | 0040-6090 1879-2731 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_28661576 |
| source | Elsevier ScienceDirect Journals |
| subjects | Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Elasticity, elastic constants Exact sciences and technology Fatigue, brittleness, fracture, and cracks Internal stress Materials science Mechanical and acoustical properties of condensed matter Mechanical properties Mechanical properties of solids Methods of deposition of films and coatings film growth and epitaxy Physics Tensile test Titanium Young's modulus |
| title | Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-23T01%3A01%3A24IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Young's%20modulus,%20fracture%20strain,%20and%20tensile%20strength%20of%20sputtered%20titanium%20thin%20films&rft.jtitle=Thin%20solid%20films&rft.au=Tsuchiya,%20Toshiyuki&rft.date=2005-07-22&rft.volume=484&rft.issue=1&rft.spage=245&rft.epage=250&rft.pages=245-250&rft.issn=0040-6090&rft.eissn=1879-2731&rft.coden=THSFAP&rft_id=info:doi/10.1016/j.tsf.2005.02.024&rft_dat=%3Cproquest_cross%3E28661576%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=28661576&rft_id=info:pmid/&rft_els_id=S0040609005002130&rfr_iscdi=true |