The microfabrication of capacitive ultrasonic transducers

Surface-micromachined capacitive ultrasonic transducers, which are suitable for operation in both air and water, have been fabricated and tested. Amorphous silicon is used as a sacrificial layer because of its good etching selectivity versus a nitride membrane, and improved cell-size control is obta...

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Veröffentlicht in:	Journal of microelectromechanical systems 1998-09, Vol.7 (3), p.295-302
Hauptverfasser:	Xuecheng Jin, Ladabaum, I., Khuri-Yakub, B.T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustics Amorphous silicon Biomembranes Computer simulation Dynamic range Electronic equipment testing Etching Exact sciences and technology Fundamental areas of phenomenology (including applications) Lithography Microelectronic processing Micromachining Optical design Optical devices Photolithography Physics Signal to noise ratio Testing Transduction acoustical devices for the generation and reproduction of sound Two dimensional displays Ultrasonic transducers Vacuum applications
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