A study of silicon nitride nanotube synthesis at relative low temperature by thermal-heating chemical-vapor deposition method

Thermal-heating chemical-vapor deposition has been used to synthesize Si 3N 4 nanotubes by heating tetra-ethyl- ortho-silicate at 165 °C to get vapor to flow in and providing nitrogen gas to the reaction chamber as the source of Si and N, respectively. A stainless-steel wire was coiled as entangled...

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Veröffentlicht in:	Materials chemistry and physics 2005-09, Vol.93 (1), p.10-15
Hauptverfasser:	Lin, Feng-Huei, Hsu, Chung-King, Tang, Tzu-Piao, Lee, Jinn-Shing, Lin, Jia-Yu, Kang, Pei-Leun
Format:	Artikel
Sprache:	eng
Schlagworte:	Si 3N 4 nanotube Stainless-steel Tetra-ethyl- ortho-silicate Thermal-heating chemical-vapor deposition
Online-Zugang:	Volltext
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