Structure of Ti1-XTaxN Thin Films Prepared by DC-Magnetron Sputtering

X-ray photoelectron spectroscopy (XPS) and high resolution transmission electron microscopy (HRTEM) were used to investigate the effect of tantalum addition on the TiN thin films structure. Both the HRTEM and selected area electron diffraction have showed that the films possess a fine grained polycr...

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Veröffentlicht in:	Materials science forum 2005-01, Vol.480-481, p.387-392
Hauptverfasser:	Bourbia, O., Guerfi, N., Mosser, A., Achour, S., Tabet, Nouar
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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