Structural stability of indium oxide films deposited by spray pyrolysis during thermal annealing
The results of the analysis of In 2O 3 film properties' stability during thermal annealing in the temperature range from 500 to 1100 °C are presented in this article. In 2O 3 films were deposited by spray pyrolysis from 0.2 M InCl 3–water solution. Annealing was carried out in the atmosphere of...
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| Veröffentlicht in: | Thin solid films 2005-05, Vol.479 (1), p.38-51 |
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| creator | Korotcenkov, G. Brinzari, V. Ivanov, M. Cerneavschi, A. Rodriguez, J. Cirera, A. Cornet, A. Morante, J. |
| description | The results of the analysis of In
2O
3 film properties' stability during thermal annealing in the temperature range from 500 to 1100 °C are presented in this article. In
2O
3 films were deposited by spray pyrolysis from 0.2 M InCl
3–water solution. Annealing was carried out in the atmosphere of usual air. The change of parameters, such as film morphology, grain size, texture, intensity of cathodoluminescence, and Raman scattering, was controlled. For structural analysis of tested films, we used X-ray diffraction, scanning electron microscopy, and Atomic force microscopy techniques. It was determined that the change of In
2O
3 film structure during thermal treatment in oxygen-containing atmosphere goes through the following four standard stages of structure transformation of polycrystalline materials: the stage of structural stability of the film (25–500 °C); the stage of coalescence of grains forming agglomerates (500–700 °C); the stage of local structural reconstruction (700–1000 °C); and the stage of global (comprehensive) structural reconstruction (>1000 °C). The influence of grain size (10–60 nm), film thickness (20–400 nm), and deposition parameters (
T
pyr=390–520 °C) on structural stability of In
2O
3 films is discussed as well. |
| doi_str_mv | 10.1016/j.tsf.2004.11.107 |
| format | Article |
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2O
3 film properties' stability during thermal annealing in the temperature range from 500 to 1100 °C are presented in this article. In
2O
3 films were deposited by spray pyrolysis from 0.2 M InCl
3–water solution. Annealing was carried out in the atmosphere of usual air. The change of parameters, such as film morphology, grain size, texture, intensity of cathodoluminescence, and Raman scattering, was controlled. For structural analysis of tested films, we used X-ray diffraction, scanning electron microscopy, and Atomic force microscopy techniques. It was determined that the change of In
2O
3 film structure during thermal treatment in oxygen-containing atmosphere goes through the following four standard stages of structure transformation of polycrystalline materials: the stage of structural stability of the film (25–500 °C); the stage of coalescence of grains forming agglomerates (500–700 °C); the stage of local structural reconstruction (700–1000 °C); and the stage of global (comprehensive) structural reconstruction (>1000 °C). The influence of grain size (10–60 nm), film thickness (20–400 nm), and deposition parameters (
T
pyr=390–520 °C) on structural stability of In
2O
3 films is discussed as well.</description><identifier>ISSN: 0040-6090</identifier><identifier>EISSN: 1879-2731</identifier><identifier>DOI: 10.1016/j.tsf.2004.11.107</identifier><identifier>CODEN: THSFAP</identifier><language>eng</language><publisher>Lausanne: Elsevier B.V</publisher><subject>Annealing ; Cathodoluminescence, ionoluminescence ; Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; Indium oxide ; Materials science ; Methods of deposition of films and coatings; film growth and epitaxy ; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation ; Other luminescence and radiative recombination ; Physics ; Spray coating techniques ; Spray pyrolysis ; Structural properties</subject><ispartof>Thin solid films, 2005-05, Vol.479 (1), p.38-51</ispartof><rights>2004 Elsevier B.V.</rights><rights>2005 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c424t-196dc0eae47428556372ebab4dd776d05ac7a58859ef67a02c81e9e5a0a22a613</citedby><cites>FETCH-LOGICAL-c424t-196dc0eae47428556372ebab4dd776d05ac7a58859ef67a02c81e9e5a0a22a613</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.tsf.2004.11.107$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,780,784,3549,27923,27924,45994</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=16684657$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Korotcenkov, G.</creatorcontrib><creatorcontrib>Brinzari, V.</creatorcontrib><creatorcontrib>Ivanov, M.</creatorcontrib><creatorcontrib>Cerneavschi, A.</creatorcontrib><creatorcontrib>Rodriguez, J.</creatorcontrib><creatorcontrib>Cirera, A.</creatorcontrib><creatorcontrib>Cornet, A.</creatorcontrib><creatorcontrib>Morante, J.</creatorcontrib><title>Structural stability of indium oxide films deposited by spray pyrolysis during thermal annealing</title><title>Thin solid films</title><description>The results of the analysis of In
2O
3 film properties' stability during thermal annealing in the temperature range from 500 to 1100 °C are presented in this article. In
2O
3 films were deposited by spray pyrolysis from 0.2 M InCl
3–water solution. Annealing was carried out in the atmosphere of usual air. The change of parameters, such as film morphology, grain size, texture, intensity of cathodoluminescence, and Raman scattering, was controlled. For structural analysis of tested films, we used X-ray diffraction, scanning electron microscopy, and Atomic force microscopy techniques. It was determined that the change of In
2O
3 film structure during thermal treatment in oxygen-containing atmosphere goes through the following four standard stages of structure transformation of polycrystalline materials: the stage of structural stability of the film (25–500 °C); the stage of coalescence of grains forming agglomerates (500–700 °C); the stage of local structural reconstruction (700–1000 °C); and the stage of global (comprehensive) structural reconstruction (>1000 °C). The influence of grain size (10–60 nm), film thickness (20–400 nm), and deposition parameters (
T
pyr=390–520 °C) on structural stability of In
2O
3 films is discussed as well.</description><subject>Annealing</subject><subject>Cathodoluminescence, ionoluminescence</subject><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Indium oxide</subject><subject>Materials science</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation</subject><subject>Other luminescence and radiative recombination</subject><subject>Physics</subject><subject>Spray coating techniques</subject><subject>Spray pyrolysis</subject><subject>Structural properties</subject><issn>0040-6090</issn><issn>1879-2731</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNp9kE-LFDEQxYO44Li7H8BbLnrrMcl0J2k8yeKqsOBBPWdrkmrNkP5jKi32tzfDLHjzVPDq915Rj7FXUuylkPrtaV9o2Csh2r2UVTLP2E5a0zfKHORztqsL0WjRixfsJdFJCCGVOuzY49eSV1_WDIlTgWNMsWx8HnicQlxHPv-JAfkQ00g84DJTLBj4ceO0ZNj4suU5bRTrcs1x-sHLT8xjzYJpQkhVuWFXAyTC26d5zb7ff_h296l5-PLx8937h8a3qi2N7HXwAgFb0yrbdfpgFB7h2IZgjA6iA2-gs7brcdAGhPJWYo8dCFAKtDxcszeX3CXPv1ak4sZIHlOCCeeVnLJaWat0BeUF9Hkmyji4JccR8uakcOcu3cnVLt25SydllUz1vH4KB_KQhgyTj_TPqLVtdXfm3l04rJ_-jpgd-YiTxxAz-uLCHP9z5S_32otw</recordid><startdate>20050523</startdate><enddate>20050523</enddate><creator>Korotcenkov, G.</creator><creator>Brinzari, V.</creator><creator>Ivanov, M.</creator><creator>Cerneavschi, A.</creator><creator>Rodriguez, J.</creator><creator>Cirera, A.</creator><creator>Cornet, A.</creator><creator>Morante, J.</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20050523</creationdate><title>Structural stability of indium oxide films deposited by spray pyrolysis during thermal annealing</title><author>Korotcenkov, G. ; Brinzari, V. ; Ivanov, M. ; Cerneavschi, A. ; Rodriguez, J. ; Cirera, A. ; Cornet, A. ; Morante, J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c424t-196dc0eae47428556372ebab4dd776d05ac7a58859ef67a02c81e9e5a0a22a613</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Annealing</topic><topic>Cathodoluminescence, ionoluminescence</topic><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Exact sciences and technology</topic><topic>Indium oxide</topic><topic>Materials science</topic><topic>Methods of deposition of films and coatings; film growth and epitaxy</topic><topic>Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation</topic><topic>Other luminescence and radiative recombination</topic><topic>Physics</topic><topic>Spray coating techniques</topic><topic>Spray pyrolysis</topic><topic>Structural properties</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Korotcenkov, G.</creatorcontrib><creatorcontrib>Brinzari, V.</creatorcontrib><creatorcontrib>Ivanov, M.</creatorcontrib><creatorcontrib>Cerneavschi, A.</creatorcontrib><creatorcontrib>Rodriguez, J.</creatorcontrib><creatorcontrib>Cirera, A.</creatorcontrib><creatorcontrib>Cornet, A.</creatorcontrib><creatorcontrib>Morante, J.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Thin solid films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Korotcenkov, G.</au><au>Brinzari, V.</au><au>Ivanov, M.</au><au>Cerneavschi, A.</au><au>Rodriguez, J.</au><au>Cirera, A.</au><au>Cornet, A.</au><au>Morante, J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Structural stability of indium oxide films deposited by spray pyrolysis during thermal annealing</atitle><jtitle>Thin solid films</jtitle><date>2005-05-23</date><risdate>2005</risdate><volume>479</volume><issue>1</issue><spage>38</spage><epage>51</epage><pages>38-51</pages><issn>0040-6090</issn><eissn>1879-2731</eissn><coden>THSFAP</coden><abstract>The results of the analysis of In
2O
3 film properties' stability during thermal annealing in the temperature range from 500 to 1100 °C are presented in this article. In
2O
3 films were deposited by spray pyrolysis from 0.2 M InCl
3–water solution. Annealing was carried out in the atmosphere of usual air. The change of parameters, such as film morphology, grain size, texture, intensity of cathodoluminescence, and Raman scattering, was controlled. For structural analysis of tested films, we used X-ray diffraction, scanning electron microscopy, and Atomic force microscopy techniques. It was determined that the change of In
2O
3 film structure during thermal treatment in oxygen-containing atmosphere goes through the following four standard stages of structure transformation of polycrystalline materials: the stage of structural stability of the film (25–500 °C); the stage of coalescence of grains forming agglomerates (500–700 °C); the stage of local structural reconstruction (700–1000 °C); and the stage of global (comprehensive) structural reconstruction (>1000 °C). The influence of grain size (10–60 nm), film thickness (20–400 nm), and deposition parameters (
T
pyr=390–520 °C) on structural stability of In
2O
3 films is discussed as well.</abstract><cop>Lausanne</cop><pub>Elsevier B.V</pub><doi>10.1016/j.tsf.2004.11.107</doi><tpages>14</tpages></addata></record> |
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| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Annealing Cathodoluminescence, ionoluminescence Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Indium oxide Materials science Methods of deposition of films and coatings film growth and epitaxy Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Other luminescence and radiative recombination Physics Spray coating techniques Spray pyrolysis Structural properties |
| title | Structural stability of indium oxide films deposited by spray pyrolysis during thermal annealing |
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