Three-dimensional microfabrication by localized electrochemical deposition

A microfabrication technology capable of electrodepositing truly three-dimensional metal structures is introduced. Micrometer-scale nickel structures including a multicoiled helical spring have been fabricated. Electrodeposition is localized by placing a sharp-tipped electrode in a plating solution,...

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Veröffentlicht in:	Journal of microelectromechanical systems 1996-03, Vol.5 (1), p.24-32
Hauptverfasser:	Madden, J.D., Hunter, I.W.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Building materials Chemical lasers Electrodes Electronics Exact sciences and technology Lithography Microelectronic fabrication (materials and surfaces technology) Microelectronics Optical materials Polymers Prototypes Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Silicon Springs
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