On the thermal aspects of ductile regime micro-scratching of single crystal silicon for NEMS/MEMS applications

Ductile regime machining, DRM, of silicon offers an advantageous alternative to produce a material base that is suitable for MEMS/NEMS fabrication. DRM of brittle materials is due to the joined influence of a thermal and a mechanical effect. Due to the relative facility by which the mechanical behav...

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Veröffentlicht in:	Wear 2005-07, Vol.259 (7), p.1343-1351
Hauptverfasser:	Abdel-Aal, Hisham A, Patten, John A., Dong, Lei
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Ductile regime Exact sciences and technology Friction, wear, lubrication Industrial metrology. Testing Instruments, apparatus, components and techniques common to several branches of physics and astronomy Machine components Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Micromechanical devices and systems NEMS/MEMS application Physics Silicon
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