Dual-Backplate CMUTs with Wide Bandwidth and Low Driving Voltage for Airborne Applications

In this work, novel airborne capacitive micromachined ultrasonic transducers (CMUTs) based on a dual-backplate (DBP) technology are presented. In contrast to conventional CMUTs, these transducers use a three-electrode-based capacitive system, where the membrane is placed between two highly-perforate...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2023-10, Vol.70 (10), p.1-1
Hauptverfasser:	Anzinger, Sebastian, Bretthauer, Christian, Wasisto, Hutomo Suryo, Dehe, Alfons
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustics Actuation Air-coupling Bandwidth Bandwidths CMUT Damping distance-sensing dual-backplate Electrodes MEMS Metal plates Micromachining Micromechanical devices Sensitivity Silicon Transducers ultrasound transducers Voltage measurement
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