Properties of R.F. magnetron sputtered cadmium–tin–oxide and indium–tin–oxide thin films

The electrical, optical, structural, chemical, and etch properties of r.f. magnetron, sputter-deposited thin films of indium–tin–oxide (ITO) and cadmium–tin–oxide (CTO) are presented. Polycrystalline thin films of CTO and ITO with distinct diffraction peaks corresponding to the (220), (222), and (40...

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Veröffentlicht in:	Thin solid films 2005-05, Vol.479 (1), p.223-231
Hauptverfasser:	Wohlmuth, Walter, Adesida, Ilesanmi
Format:	Artikel
Sprache:	eng
Schlagworte:	Cadmium tin oxide Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Etching Exact sciences and technology Indium tin oxide Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Schottky barrier Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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