A device for measurements of the temperature response to single discharges with high local resolution and fast response time

We report on a thermal device consisting of 14 thin film Au–Pd thermocouples designed to measure the transient temperature response of a sample (a thin 50 μm thick steel foil) submitted to a single discharge. Junctions as small as 4 μm 2 were patterned using standard photolithography. The distance b...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2005-02, Vol.118 (2), p.238-243
Hauptverfasser:	Revaz, B., Flükiger, R., Carron, J., Rappaz, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Electron discharge machining (EDM) Micromachining Thin film thermocouples Ultrafast cooling
Online-Zugang:	Volltext
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