A microfluidic experimental platform with internal pressure measurements

Large inconsistencies in previous microchannel pressure drop data have motivated the development of a microchannel experimental platform that enables the measurement of pressures inside the microchannel. The system utilizes bulk etched silicon components that integrate pressure-sensing membranes wit...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2005-02, Vol.118 (2), p.212-221
Hauptverfasser:	Kohl, M.J., Abdel-Khalik, S.I., Jeter, S.M., Sadowski, D.L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Microchannel Microfluidics Optical-lever Pressure sensor
Online-Zugang:	Volltext
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