Flip-chip suspended gate field effect transistors for ammonia detection

Ammonia sensitive field effect transistors (FET) realised in a hybrid flip-chip technology have been produced and investigated. The ammonia sensitive element, the suspended gate (SG) in the transistor structure, is a thin polyacrylic acid (PAA) layer prepared by spray deposition on a gold plated alu...

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Veröffentlicht in:	Sensors and actuators. B, Chemical Chemical, 2005-11, Vol.111 (Complete), p.582-586
Hauptverfasser:	Oprea, A., Simon, E., Fleischer, M., Frerichs, H.-P., Wilbertz, Ch, Lehmann, M., Weimar, U.
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Ammonia Ammonia sensor Devices Field effect transistors Gates Polyacrylic acid Semiconductor devices Sensors Suspended gate field effect transistor Transistors
Online-Zugang:	Volltext
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