A new edge-detected lift force flow sensor

A lift force gas flow sensor which uses the force normal to the fluid flow to measure the flow velocity has recently been introduced. Two thin plates mounted at an angle are deflected when they are subjected to fluid flow. For most mechanical flow sensors the flow sensitivity is closely connected to...

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of microelectromechanical systems 2003-06, Vol.12 (3), p.344-354
Hauptverfasser:	Svedin, N., Kalvesten, E., Stemme, G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical models Computational fluid dynamics Cross-disciplinary physics: materials science rheology Detectors Exact sciences and technology Flow velocity Fluid dynamics Fluid flow Fluid flow measurement Fluids Force measurement Force sensors Frequency Fundamental areas of phenomenology (including applications) Gas detectors Gas flow Instrumentation for fluid dynamics Instruments, apparatus, components and techniques common to several branches of physics and astronomy Lift Materials science Mechanical instruments, equipment and techniques Mechanical sensors Micromechanical devices and systems Nanoscale materials and structures: fabrication and characterization Physics Resonant frequency Sensors Strain gauges Studies Time factors Velocity measurement
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