Integrated optical polarization-discriminating receiver in glass

We have successfully demonstrated an integrated optical TE-TM mode discriminator using waveguide polarizers and guided-wave photodetectors for use in polarimetric optical sensor and positioning systems. The photonic integrated circuit consists of a Y-branch waveguide splitter formed by potassium-sodium ion exchange in silicate glass. Hydrogenated amorphous silicon claddings were deposited on each branch of the splitter to act as polarizers. One output cladding was trimmed to a thickness which attenuated the TE polarization, while the other cladding was trimmed to attenuate light having TM polarization. The thickness trimming was accomplished using a process of localized plasma etching which allows in situ extinction optimization by monitoring transmitted light. Optical extinction ratios of up to 27 dB were demonstrated on Y-branch waveguides for polarizers with claddings 1.2 mm in length. The integrated receiver was completed with the deposition of metal-semiconductor-metal photodetectors on each of the output waveguide branches following the polarizers. Amorphous silicon claddings were contacted with chrome-gold interdigitated Schottky contacts to form the waveguide detectors.