Etching and annealing of substrates for superconducting multilayers and devices

The structural and electrical quality of YBa/sub 2/Cu/sub 3/O/sub 7- delta / grown on ion-etched substrates by a variety of techniques was investigated. Co-evaporated YBa/sub 2/Cu/sub 3/O/sub 7- delta / films deposited and postannealed on etched LaAlO/sub 3/ substrates have substantially higher room...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 1993-03, Vol.3 (1), p.2950-2952
Hauptverfasser:	Berkowitz, S.J., De Obaldia, E., Galloway, M.L., Morales, G., Ludwig, K.F., Mankiewich, P.M., Skocpol, W.J., Ono, R.H., Beall, J.A., Vale, L.R., Rudman, D.A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Applied sciences Capacitive sensors Conductivity Critical current density Electronics Etching Exact sciences and technology Josephson junctions Microelectronic fabrication (materials and surfaces technology) Nonhomogeneous media Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Substrates Superconducting devices Superconducting films
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