Synthesis and deposition of coatings in the electron beam plasma

Non-equilibrium electron beam plasma (EBP) was proved to be promising for surface modification of materials, synthesis of protective coatings, and film deposition at sufficiently high plasma pressures (up to 50 Torr). The optimal EBP parameters were selected to produce active plasma particles in des...

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Bibliographische Detailangaben

Veröffentlicht in:	Surface & coatings technology 2004-03, Vol.180, p.132-135
Hauptverfasser:	Vasiliev, M.N., Mahir, A.H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Electron-beam plasma Plasmachemical treatment
Online-Zugang:	Volltext
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