The effect of atomic hydrogen flow on electrical resistance of the transition metal films

On using of nuclear reaction analysis, X-ray analysis, electron microscopy, the mechanisms of structure and phase composition change of thin vanadium films at treatment in a flow consisting of molecular and atomic hydrogen (AH) have been studied. A comparative analysis on regularities of the film sa...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2004-08, Vol.113 (3), p.293-300
Hauptverfasser:	Kagadei, V., Nefyodtsev, E., Proskurovsky, D., Romanenko, Sv, Shevchenko, N., Grambole, D., Groetzschel, R., Herrmann, F., Ivanov, Yu
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic hydrogen Electrical conductivity Gas sensor
Online-Zugang:	Volltext
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