Wafer-scale inverted gallium phosphide-on-insulator rib waveguides for nonlinear photonics

We report a gallium phosphide-on-insulator (GaP-OI) photonic platform fabricated by an intermediate-layer bonding process aiming to increase the manufacture scalability in a low-cost manner. This is enabled by the "etch-n-transfer" sequence, which results in inverted rib waveguide structur...

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Veröffentlicht in:Optics letters 2023-07, Vol.48 (14), p.3781-3784
Hauptverfasser: Cheng, Weiren, Geng, Zhaoting, Yu, Zhuoyu, Liu, Yihan, Yang, Yatao, Wu, Pengzhuo, Ji, Houling, Yu, Xiaolun, Wang, Yifan, Bao, Changjing, Li, Yi, Zhao, Qiancheng
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container_end_page 3784
container_issue 14
container_start_page 3781
container_title Optics letters
container_volume 48
creator Cheng, Weiren
Geng, Zhaoting
Yu, Zhuoyu
Liu, Yihan
Yang, Yatao
Wu, Pengzhuo
Ji, Houling
Yu, Xiaolun
Wang, Yifan
Bao, Changjing
Li, Yi
Zhao, Qiancheng
description We report a gallium phosphide-on-insulator (GaP-OI) photonic platform fabricated by an intermediate-layer bonding process aiming to increase the manufacture scalability in a low-cost manner. This is enabled by the "etch-n-transfer" sequence, which results in inverted rib waveguide structures. The shallow-etched 1.8 µm-wide waveguide has a propagation loss of 23.5 dB/cm at 1550 nm wavelength. Supercontinuum generation based on the self-phase modulation effect is observed when the waveguides are pumped by femtosecond pulses. The nonlinear refractive index of GaP, n , is extracted to be 1.9 × 10  m /W, demonstrating the great promise of the GaP-OI platform in third-order nonlinear applications.
doi_str_mv 10.1364/OL.494949
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fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_2838252530</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2838252530</sourcerecordid><originalsourceid>FETCH-LOGICAL-c313t-497134963b4d2785cfc085ff01008117380addfc59c43d24da7056602d6710e23</originalsourceid><addsrcrecordid>eNpdkE1LAzEQhoMoWqsH_4AseNHD1nxnc5TiFxR6UQQvS5pk25TdZE12K_57t7Z6kDkMzDzzMjwAXCA4QYTT2_lsQuW2DsAIMSJzKiQ9BCOIKM8lk_gEnKa0hhByQcgxOCGCMiioHIH3N1XZmCetaps5v7GxsyZbqrp2fZO1q5DalTM2Dz53PvW16kLMoltkn2pjl_2wSlk1jHzwtfNWxe1NF7zT6QwcVapO9nzfx-D14f5l-pTP5o_P07tZrgkiXU6lQIRKThbUYFEwXWlYsKqCCMICIUEKqIypNJOaEoOpUQIyziE2XCBoMRmD611uG8NHb1NXNi5pW9fK29CnEhekwAwzAgf06h-6Dn30w3c_lOBUYjFQNztKx5BStFXZRteo-FUiWG6Fl_NZuRM-sJf7xH7RWPNH_hom30uaeho</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2838764927</pqid></control><display><type>article</type><title>Wafer-scale inverted gallium phosphide-on-insulator rib waveguides for nonlinear photonics</title><source>Optica Publishing Group Journals</source><creator>Cheng, Weiren ; Geng, Zhaoting ; Yu, Zhuoyu ; Liu, Yihan ; Yang, Yatao ; Wu, Pengzhuo ; Ji, Houling ; Yu, Xiaolun ; Wang, Yifan ; Bao, Changjing ; Li, Yi ; Zhao, Qiancheng</creator><creatorcontrib>Cheng, Weiren ; Geng, Zhaoting ; Yu, Zhuoyu ; Liu, Yihan ; Yang, Yatao ; Wu, Pengzhuo ; Ji, Houling ; Yu, Xiaolun ; Wang, Yifan ; Bao, Changjing ; Li, Yi ; Zhao, Qiancheng</creatorcontrib><description>We report a gallium phosphide-on-insulator (GaP-OI) photonic platform fabricated by an intermediate-layer bonding process aiming to increase the manufacture scalability in a low-cost manner. This is enabled by the "etch-n-transfer" sequence, which results in inverted rib waveguide structures. The shallow-etched 1.8 µm-wide waveguide has a propagation loss of 23.5 dB/cm at 1550 nm wavelength. Supercontinuum generation based on the self-phase modulation effect is observed when the waveguides are pumped by femtosecond pulses. The nonlinear refractive index of GaP, n , is extracted to be 1.9 × 10  m /W, demonstrating the great promise of the GaP-OI platform in third-order nonlinear applications.</description><identifier>ISSN: 0146-9592</identifier><identifier>EISSN: 1539-4794</identifier><identifier>DOI: 10.1364/OL.494949</identifier><identifier>PMID: 37450749</identifier><language>eng</language><publisher>United States: Optical Society of America</publisher><subject>Equipment Design ; Femtosecond pulses ; Gallium phosphides ; Optics and Photonics ; Phase modulation ; Photonics ; Refractivity ; Refractometry ; Ribs ; Wave propagation ; Waveguides</subject><ispartof>Optics letters, 2023-07, Vol.48 (14), p.3781-3784</ispartof><rights>Copyright Optical Society of America Jul 15, 2023</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c313t-497134963b4d2785cfc085ff01008117380addfc59c43d24da7056602d6710e23</citedby><cites>FETCH-LOGICAL-c313t-497134963b4d2785cfc085ff01008117380addfc59c43d24da7056602d6710e23</cites><orcidid>0000-0002-0696-8667 ; 0000-0002-6134-3117</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,3258,27924,27925</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/37450749$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Cheng, Weiren</creatorcontrib><creatorcontrib>Geng, Zhaoting</creatorcontrib><creatorcontrib>Yu, Zhuoyu</creatorcontrib><creatorcontrib>Liu, Yihan</creatorcontrib><creatorcontrib>Yang, Yatao</creatorcontrib><creatorcontrib>Wu, Pengzhuo</creatorcontrib><creatorcontrib>Ji, Houling</creatorcontrib><creatorcontrib>Yu, Xiaolun</creatorcontrib><creatorcontrib>Wang, Yifan</creatorcontrib><creatorcontrib>Bao, Changjing</creatorcontrib><creatorcontrib>Li, Yi</creatorcontrib><creatorcontrib>Zhao, Qiancheng</creatorcontrib><title>Wafer-scale inverted gallium phosphide-on-insulator rib waveguides for nonlinear photonics</title><title>Optics letters</title><addtitle>Opt Lett</addtitle><description>We report a gallium phosphide-on-insulator (GaP-OI) photonic platform fabricated by an intermediate-layer bonding process aiming to increase the manufacture scalability in a low-cost manner. This is enabled by the "etch-n-transfer" sequence, which results in inverted rib waveguide structures. The shallow-etched 1.8 µm-wide waveguide has a propagation loss of 23.5 dB/cm at 1550 nm wavelength. Supercontinuum generation based on the self-phase modulation effect is observed when the waveguides are pumped by femtosecond pulses. The nonlinear refractive index of GaP, n , is extracted to be 1.9 × 10  m /W, demonstrating the great promise of the GaP-OI platform in third-order nonlinear applications.</description><subject>Equipment Design</subject><subject>Femtosecond pulses</subject><subject>Gallium phosphides</subject><subject>Optics and Photonics</subject><subject>Phase modulation</subject><subject>Photonics</subject><subject>Refractivity</subject><subject>Refractometry</subject><subject>Ribs</subject><subject>Wave propagation</subject><subject>Waveguides</subject><issn>0146-9592</issn><issn>1539-4794</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2023</creationdate><recordtype>article</recordtype><recordid>eNpdkE1LAzEQhoMoWqsH_4AseNHD1nxnc5TiFxR6UQQvS5pk25TdZE12K_57t7Z6kDkMzDzzMjwAXCA4QYTT2_lsQuW2DsAIMSJzKiQ9BCOIKM8lk_gEnKa0hhByQcgxOCGCMiioHIH3N1XZmCetaps5v7GxsyZbqrp2fZO1q5DalTM2Dz53PvW16kLMoltkn2pjl_2wSlk1jHzwtfNWxe1NF7zT6QwcVapO9nzfx-D14f5l-pTP5o_P07tZrgkiXU6lQIRKThbUYFEwXWlYsKqCCMICIUEKqIypNJOaEoOpUQIyziE2XCBoMRmD611uG8NHb1NXNi5pW9fK29CnEhekwAwzAgf06h-6Dn30w3c_lOBUYjFQNztKx5BStFXZRteo-FUiWG6Fl_NZuRM-sJf7xH7RWPNH_hom30uaeho</recordid><startdate>20230715</startdate><enddate>20230715</enddate><creator>Cheng, Weiren</creator><creator>Geng, Zhaoting</creator><creator>Yu, Zhuoyu</creator><creator>Liu, Yihan</creator><creator>Yang, Yatao</creator><creator>Wu, Pengzhuo</creator><creator>Ji, Houling</creator><creator>Yu, Xiaolun</creator><creator>Wang, Yifan</creator><creator>Bao, Changjing</creator><creator>Li, Yi</creator><creator>Zhao, Qiancheng</creator><general>Optical Society of America</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>7X8</scope><orcidid>https://orcid.org/0000-0002-0696-8667</orcidid><orcidid>https://orcid.org/0000-0002-6134-3117</orcidid></search><sort><creationdate>20230715</creationdate><title>Wafer-scale inverted gallium phosphide-on-insulator rib waveguides for nonlinear photonics</title><author>Cheng, Weiren ; Geng, Zhaoting ; Yu, Zhuoyu ; Liu, Yihan ; Yang, Yatao ; Wu, Pengzhuo ; Ji, Houling ; Yu, Xiaolun ; Wang, Yifan ; Bao, Changjing ; Li, Yi ; Zhao, Qiancheng</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c313t-497134963b4d2785cfc085ff01008117380addfc59c43d24da7056602d6710e23</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2023</creationdate><topic>Equipment Design</topic><topic>Femtosecond pulses</topic><topic>Gallium phosphides</topic><topic>Optics and Photonics</topic><topic>Phase modulation</topic><topic>Photonics</topic><topic>Refractivity</topic><topic>Refractometry</topic><topic>Ribs</topic><topic>Wave propagation</topic><topic>Waveguides</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Cheng, Weiren</creatorcontrib><creatorcontrib>Geng, Zhaoting</creatorcontrib><creatorcontrib>Yu, Zhuoyu</creatorcontrib><creatorcontrib>Liu, Yihan</creatorcontrib><creatorcontrib>Yang, Yatao</creatorcontrib><creatorcontrib>Wu, Pengzhuo</creatorcontrib><creatorcontrib>Ji, Houling</creatorcontrib><creatorcontrib>Yu, Xiaolun</creatorcontrib><creatorcontrib>Wang, Yifan</creatorcontrib><creatorcontrib>Bao, Changjing</creatorcontrib><creatorcontrib>Li, Yi</creatorcontrib><creatorcontrib>Zhao, Qiancheng</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><jtitle>Optics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Cheng, Weiren</au><au>Geng, Zhaoting</au><au>Yu, Zhuoyu</au><au>Liu, Yihan</au><au>Yang, Yatao</au><au>Wu, Pengzhuo</au><au>Ji, Houling</au><au>Yu, Xiaolun</au><au>Wang, Yifan</au><au>Bao, Changjing</au><au>Li, Yi</au><au>Zhao, Qiancheng</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Wafer-scale inverted gallium phosphide-on-insulator rib waveguides for nonlinear photonics</atitle><jtitle>Optics letters</jtitle><addtitle>Opt Lett</addtitle><date>2023-07-15</date><risdate>2023</risdate><volume>48</volume><issue>14</issue><spage>3781</spage><epage>3784</epage><pages>3781-3784</pages><issn>0146-9592</issn><eissn>1539-4794</eissn><abstract>We report a gallium phosphide-on-insulator (GaP-OI) photonic platform fabricated by an intermediate-layer bonding process aiming to increase the manufacture scalability in a low-cost manner. This is enabled by the "etch-n-transfer" sequence, which results in inverted rib waveguide structures. The shallow-etched 1.8 µm-wide waveguide has a propagation loss of 23.5 dB/cm at 1550 nm wavelength. Supercontinuum generation based on the self-phase modulation effect is observed when the waveguides are pumped by femtosecond pulses. The nonlinear refractive index of GaP, n , is extracted to be 1.9 × 10  m /W, demonstrating the great promise of the GaP-OI platform in third-order nonlinear applications.</abstract><cop>United States</cop><pub>Optical Society of America</pub><pmid>37450749</pmid><doi>10.1364/OL.494949</doi><tpages>4</tpages><orcidid>https://orcid.org/0000-0002-0696-8667</orcidid><orcidid>https://orcid.org/0000-0002-6134-3117</orcidid></addata></record>
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source Optica Publishing Group Journals
subjects Equipment Design
Femtosecond pulses
Gallium phosphides
Optics and Photonics
Phase modulation
Photonics
Refractivity
Refractometry
Ribs
Wave propagation
Waveguides
title Wafer-scale inverted gallium phosphide-on-insulator rib waveguides for nonlinear photonics
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-26T01%3A52%3A55IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Wafer-scale%20inverted%20gallium%20phosphide-on-insulator%20rib%20waveguides%20for%20nonlinear%20photonics&rft.jtitle=Optics%20letters&rft.au=Cheng,%20Weiren&rft.date=2023-07-15&rft.volume=48&rft.issue=14&rft.spage=3781&rft.epage=3784&rft.pages=3781-3784&rft.issn=0146-9592&rft.eissn=1539-4794&rft_id=info:doi/10.1364/OL.494949&rft_dat=%3Cproquest_cross%3E2838252530%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2838764927&rft_id=info:pmid/37450749&rfr_iscdi=true